EP 3495433 A1 20190612 - CONDUCTIVE POLYMER COMPOSITION, COATED ARTICLE, AND PATTERNING PROCESS
Title (en)
CONDUCTIVE POLYMER COMPOSITION, COATED ARTICLE, AND PATTERNING PROCESS
Title (de)
LEITFÄHIGE POLYMERZUSAMMENSETZUNG, BESCHICHTETER ARTIKEL UND STRUKTURIERUNGSVERFAHREN
Title (fr)
COMPOSITION POLYMÈRE CONDUCTRICE, ARTICLE REVÊTU ET PROCÉDÉ DE FORMATION DE MOTIFS
Publication
Application
Priority
JP 2017235494 A 20171207
Abstract (en)
The present invention is a conductive polymer composition including: (A) a polyaniline-based conductive polymer having two or more kinds of repeating units shown by the following general formula (1); and (B) a dopant polymer which contains a repeating unit shown by the following general formula (2) and has a weight-average molecular weight in a range of 1,000 to 500,000.This provides a conductive polymer composition having good filterability and film-formability of a flat film onto an electron beam resist, and being suitably usable for a antistatic film for electron beam resist drawing having lower surface resistivity (Ω/□) to show excellent antistatic performance in an electron beam drawing process, and excellent peelability with HO or an alkaline developer after drawing.
IPC 8 full level
C09D 125/18 (2006.01); C08G 73/02 (2006.01); C09D 133/14 (2006.01); C09D 179/02 (2006.01); G03F 7/09 (2006.01)
CPC (source: CN EP US)
C08F 12/20 (2013.01 - US); C08F 12/30 (2013.01 - US); C08F 212/20 (2020.02 - EP US); C08F 212/30 (2020.02 - EP US); C08G 61/04 (2013.01 - US); C08G 73/0266 (2013.01 - EP US); C09D 5/24 (2013.01 - CN); C09D 7/65 (2017.12 - CN); C09D 125/18 (2013.01 - EP US); C09D 133/14 (2013.01 - EP US); C09D 179/02 (2013.01 - CN EP US); G03F 1/20 (2013.01 - CN); G03F 7/093 (2013.01 - EP US); H01B 1/128 (2013.01 - EP US); C08G 2261/1426 (2013.01 - US); C08G 2261/1452 (2013.01 - US); C08G 2261/146 (2013.01 - US); C08G 2261/148 (2013.01 - US); C08L 2201/04 (2013.01 - CN); G03F 7/164 (2013.01 - US)
Citation (applicant)
- JP 2902727 B2 19990607
- US 5370825 A 19941206 - ANGELOPOULOS MARIE [US], et al
- JP 2014009342 A 20140120 - SHINETSU POLYMER CO, et al
- JP 2013228447 A 20131107 - SHINETSU CHEMICAL CO
Citation (search report)
- [XYI] US 2014038104 A1 20140206 - BOZANO LUISA DOMINICA [US], et al
- [YA] US 2016091792 A1 20160331 - NAGASAWA TAKAYUKI [JP], et al
- [A] KR 20170120940 A 20171101 - ELPANI CO LTD [KR]
Designated contracting state (EPC)
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
Designated extension state (EPC)
BA ME
DOCDB simple family (publication)
EP 3495433 A1 20190612; EP 3495433 B1 20211110; CN 110016284 A 20190716; CN 110016284 B 20230808; JP 2019099766 A 20190624; JP 2022000505 A 20220104; JP 2022184946 A 20221213; JP 6937232 B2 20210922; JP 7143494 B2 20220928; JP 7352708 B2 20230928; TW 201936815 A 20190916; US 2019180888 A1 20190613
DOCDB simple family (application)
EP 18210725 A 20181206; CN 201811487922 A 20181206; JP 2017235494 A 20171207; JP 2021139616 A 20210830; JP 2022146030 A 20220914; TW 107143821 A 20181206; US 201816209019 A 20181204