Global Patent Index - EP 3510622 A1

EP 3510622 A1 20190717 - NAP IMMERSION LENS

Title (en)

NAP IMMERSION LENS

Title (de)

NAP IMMERSIONSLINSE

Title (fr)

LENTILLE À IMMERSION NAP

Publication

EP 3510622 A1 20190717 (DE)

Application

EP 17755507 A 20170822

Priority

  • DE 102016116765 A 20160907
  • EP 2017071141 W 20170822

Abstract (en)

[origin: WO2018046293A1] A device for examining a non-gaseous sample interacting with gases in an electron- and/or ion-optical system is provided, wherein the sample is arranged in a sample chamber and the sample chamber furthermore has a diaphragm having a hole-like aperture, and wherein a potential can respectively be applied to the sample and the diaphragm, as a result of which an electric field forms between the sample and the diaphragm, such that the sample and the diaphragm together form an electrostatic immersion lens, and the electrical potentials are selectable in such a way that discharges and/or electron and/or ion scattering are/is counteracted.

IPC 8 full level

H01J 37/20 (2006.01); H01J 37/26 (2006.01)

CPC (source: EP)

H01J 37/20 (2013.01); H01J 37/26 (2013.01); H01J 2237/2003 (2013.01); H01J 2237/21 (2013.01); H01J 2237/2605 (2013.01)

Citation (search report)

See references of WO 2018046293A1

Designated contracting state (EPC)

AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR

Designated extension state (EPC)

BA ME

DOCDB simple family (publication)

DE 102016116765 B3 20180222; EP 3510622 A1 20190717; WO 2018046293 A1 20180315

DOCDB simple family (application)

DE 102016116765 A 20160907; EP 17755507 A 20170822; EP 2017071141 W 20170822