EP 3514259 A1 20190724 - PROCESS FOR MANUFACTURING A SILICON CARBIDE COATED BODY
Title (en)
PROCESS FOR MANUFACTURING A SILICON CARBIDE COATED BODY
Title (de)
VERFAHREN ZUR HERSTELLUNG EINES SILICIUMCARBIDBESCHICHTETEN KÖRPERS
Title (fr)
PROCÉDÉ DE FABRICATION D'UN CORPS REVÊTU DE CARBURE DE SILICIUM
Publication
Application
Priority
EP 18152231 A 20180118
Abstract (en)
The present invention relates to a new process for manufacturing a silicon carbide (SiC) coated body by depositing SiC in a chemical vapor deposition method using dimethyldichlorosilane (DMS) as the silane source on a graphite substrate. A further aspect of the present invention relates to the new silicon carbide coated body, which can be obtained by the new process of the present invention, and to the use thereof for manufacturing articles for high temperature applications, susceptors and reactors, semiconductor materials, and wafer.
IPC 8 full level
C23C 16/32 (2006.01); C04B 35/52 (2006.01); C04B 41/45 (2006.01)
CPC (source: CN EP KR US)
C04B 35/522 (2013.01 - EP KR US); C04B 38/00 (2013.01 - EP KR); C04B 38/0096 (2013.01 - US); C04B 41/009 (2013.01 - EP KR); C04B 41/45 (2013.01 - EP); C04B 41/4531 (2013.01 - KR US); C04B 41/5059 (2013.01 - EP KR US); C04B 41/87 (2013.01 - EP KR); C23C 16/045 (2013.01 - KR); C23C 16/325 (2013.01 - CN EP KR); C23C 16/455 (2013.01 - CN); C23C 16/4581 (2013.01 - KR); C04B 2111/00431 (2013.01 - EP); C04B 2235/72 (2013.01 - EP KR); C04B 2235/724 (2013.01 - EP KR); C04B 2235/77 (2013.01 - EP KR)
C-Set (source: EP)
Citation (applicant)
- GB 1128757 A 19681002 - TEXAS INSTRUMENTS INC
- EP 0294047 A1 19881207 - DOW CORNING [US]
- EP 0121797 A2 19841017 - REFRACTORY COMPOSITES INC [US]
- US 3925577 A 19751209 - FATZER ELMER G, et al
- US 3406044 A 19681015 - HARRIS DARREL M
- US 3622369 A 19711123 - BASCHE MALCOLM, et al
- GB 1021662 A 19660309 - MORGANITE RES & DEV LTD
- US 2914328 A 19591124 - JACK HARKINS
- WO 9427909 A1 19941208 - STRATMIN INC [CA], et al
- EP 1522523 A1 20050413 - TOYO TANSO CO [JP]
Citation (search report)
- [XAI] US 9371582 B2 20160621 - LEE CHI-YOUNG [TW], et al
- [XI] EP 0935013 A1 19990811 - TOKAI CARBON KK [JP]
- [X] US 2018002236 A1 20180104 - KOGA YASUTAKA [JP], et al
- [A] EP 1072570 A1 20010131 - ASAHI GLASS CO LTD [JP]
Designated contracting state (EPC)
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
Designated extension state (EPC)
BA ME
DOCDB simple family (publication)
EP 3514259 A1 20190724; CN 111801441 A 20201020; CN 116200723 A 20230602; CN 116949420 A 20231027; EP 3732314 A1 20201104; JP 2021508780 A 20210311; JP 7290648 B2 20230613; KR 102571078 B1 20230829; KR 20200104369 A 20200903; US 2020325078 A1 20201015; WO 2019133561 A1 20190704
DOCDB simple family (application)
EP 18152231 A 20180118; CN 201880090407 A 20181222; CN 202211741629 A 20181222; CN 202310429396 A 20181222; EP 18834284 A 20181222; JP 2020535525 A 20181222; KR 20207021801 A 20181222; US 2018067422 W 20181222; US 201816957672 A 20181222