EP 3537219 B1 20230510 - PATTERN FORMING APPARATUS AND ARTICLE MANUFACTURING METHOD
Title (en)
PATTERN FORMING APPARATUS AND ARTICLE MANUFACTURING METHOD
Title (de)
MUSTERBILDUNGSVORRICHTUNG UND VERFAHREN ZUR HERSTELLUNG VON ARTIKELN
Title (fr)
APPAREIL DE FORMATION DE MOTIFS ET PROCÉDÉ DE FABRICATION D'ARTICLE
Publication
Application
Priority
JP 2018041198 A 20180307
Abstract (en)
[origin: EP3537219A1] There is provided a pattern forming apparatus including a holding unit configured to suction and hold a substrate, and an optical system configured to detect, from a suction surface side of the substrate, an alignment mark formed on the substrate held by the holding unit. The pattern forming apparatus is provided with a wavelength separation element for performing wavelength separation between pattern forming light for forming a pattern on the substrate and alignment mark detection light for detecting the alignment mark.
IPC 8 full level
G03F 9/00 (2006.01)
CPC (source: CN EP US)
G03F 7/70141 (2013.01 - US); G03F 7/70258 (2013.01 - CN); G03F 7/70316 (2013.01 - CN); G03F 9/7084 (2013.01 - CN EP US); G03F 9/7088 (2013.01 - EP US)
Designated contracting state (EPC)
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
DOCDB simple family (publication)
EP 3537219 A1 20190911; EP 3537219 B1 20230510; CN 110244519 A 20190917; CN 110244519 B 20210709; JP 2019158926 A 20190919; JP 7114277 B2 20220808; TW 201939180 A 20191001; TW I722394 B 20210321; US 10747116 B2 20200818; US 2019278186 A1 20190912
DOCDB simple family (application)
EP 19160584 A 20190304; CN 201910167636 A 20190306; JP 2018041198 A 20180307; TW 108106986 A 20190304; US 201916292953 A 20190305