EP 3538945 A1 20190918 - IMAGE GENERATION DEVICE
Title (en)
IMAGE GENERATION DEVICE
Title (de)
BILDERZEUGUNGSEINRICHTUNG
Title (fr)
DISPOSITIF D'IMAGERIE
Publication
Application
Priority
- DE 102016221933 A 20161109
- DE 102016226212 A 20161223
- EP 2017078741 W 20171109
Abstract (en)
[origin: WO2018087219A1] The invention relates to an image generation device comprising a laser light source (1); a mirror assembly having two parabolic mirrors (3, 6) via which a scanning light beam (1a, 5) generated by the laser light source is directed onto a sample surface (9); a deflection device (2), in particular a micromirror scanner, which is controllable such that the scanning light beam (1a, 5) scans points of the sample surface in a targeted manner; and a detector (10) which detects radiation emanating from a scanned point of the sample surface. The spatial resolution of the image generation device is substantially defined by the narrowest possible focusing of the laser beam, and the accuracy of the adjustable deflection angle is defined by the micromirror scanner.
IPC 8 full level
G02B 26/10 (2006.01)
CPC (source: EP US)
G01J 3/0208 (2013.01 - US); G01J 3/021 (2013.01 - US); G01J 3/42 (2013.01 - US); G01J 3/4406 (2013.01 - US); G01N 21/4795 (2013.01 - US); G01N 21/6456 (2013.01 - EP US); G01N 21/8806 (2013.01 - EP US); G02B 17/0621 (2013.01 - EP); G02B 26/0833 (2013.01 - US); G02B 26/10 (2013.01 - US); G02B 26/101 (2013.01 - EP US); G01J 3/0208 (2013.01 - EP); G01J 3/021 (2013.01 - EP); G01J 3/42 (2013.01 - EP); G01J 2003/421 (2013.01 - US); G01N 2021/6417 (2013.01 - US); G01N 2021/6463 (2013.01 - US); G01N 2201/06113 (2013.01 - US); G01N 2201/0633 (2013.01 - US); G01N 2201/0636 (2013.01 - US); G01N 2201/1053 (2013.01 - US)
Citation (search report)
See references of WO 2018087219A1
Designated contracting state (EPC)
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
Designated extension state (EPC)
BA ME
DOCDB simple family (publication)
WO 2018087219 A1 20180517; EP 3538945 A1 20190918; US 2019310464 A1 20191010
DOCDB simple family (application)
EP 2017078741 W 20171109; EP 17797622 A 20171109; US 201716348362 A 20171109