EP 3546072 A1 20191002 - SOUND TRANSDUCER AND METHOD OF MANUFACTURING
Title (en)
SOUND TRANSDUCER AND METHOD OF MANUFACTURING
Title (de)
SCHALLWANDLER UND HERSTELLUNGSVERFAHREN
Title (fr)
TRANSDUCTEUR SONORE ET PROCÉDÉ DE FABRICATION
Publication
Application
Priority
EP 18164020 A 20180326
Abstract (en)
Provided is a process for manufacturing a sound transducer. The process comprises depositing a first metal layer onto a substrate, applying a photo resist layer to the first metal layer, exposing portions of the photo resist layer to electromagnetic radiation, developing the photo resist layer, removing portions of the first metal layer, wet etching portions of the substrate above which the first metal layer has been removed, and depositing a second metal layer onto the substrate.
IPC 8 full level
B06B 1/02 (2006.01)
CPC (source: EP)
B06B 1/0292 (2013.01)
Citation (search report)
- [XAYI] US 2017232474 A1 20170817 - ORALKAN OMER [US], et al
- [IAY] US 2005277064 A1 20051215 - LAMARRE PHILIP A [US]
Designated contracting state (EPC)
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
Designated extension state (EPC)
BA ME
DOCDB simple family (publication)
DOCDB simple family (application)
EP 18164020 A 20180326