EP 3552403 B1 20230426 - TOP-PORT MEMS MICROPHONE WITH REDUCED MECHANICAL LOADS AS WELL AS A MANUFACTURING PROCESS
Title (en)
TOP-PORT MEMS MICROPHONE WITH REDUCED MECHANICAL LOADS AS WELL AS A MANUFACTURING PROCESS
Title (de)
MEMS-MIKROFON MIT OBEN ANGEORDNETER SCHALLÖFFNUNG UND VERRINGERTEN MECHANISCHEN BELASTUNGEN UND VERFAHREN ZUR HERSTELLUNG
Title (fr)
MICROPHONE À MEMS AVEC UNE OUVERTURE SONORE SUPÉRIEURE ET AVEC DES CONTRAINTES MÉCHANIQUES RÉDUITES AINSI QU' UN PROCÉDÉ DE PRODUCTION
Publication
Application
Priority
- DE 102016124057 A 20161212
- EP 2017080348 W 20171124
Abstract (en)
[origin: WO2018108482A1] The invention relates to a MEMS microphone having good acoustic properties and a reduced failure probability due to faulty electrical connections. For this purpose, the microphone has a channel that connects a sound opening to a MEMS chip. The channel comprises a heterogeneous material from two different components which have different thermal properties.
IPC 8 full level
H04R 1/06 (2006.01); H04R 1/04 (2006.01); H04R 19/00 (2006.01); H04R 19/04 (2006.01)
CPC (source: EP)
H04R 1/06 (2013.01); H04R 19/005 (2013.01); H04R 19/04 (2013.01); H04R 1/04 (2013.01)
Citation (examination)
- DE 102011087963 A1 20120614 - BOSCH GMBH ROBERT [DE]
- EP 3329690 A1 20180606 - EPCOS AG [DE]
- US 3615972 A 19711026 - MOREHOUSE DONALD S JR, et al
- DE 102011080142 A1 20130131 - ENDRESS & HAUSER GMBH & CO KG [DE], et al
Designated contracting state (EPC)
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
DOCDB simple family (publication)
DE 102016124057 A1 20180614; EP 3552403 A1 20191016; EP 3552403 B1 20230426; WO 2018108482 A1 20180621
DOCDB simple family (application)
DE 102016124057 A 20161212; EP 17804880 A 20171124; EP 2017080348 W 20171124