EP 3555475 B1 20200923 - VACUUM PUMP SYSTEM AND METHOD FOR OPERATING A VACUUM PUMP SYSTEM
Title (en)
VACUUM PUMP SYSTEM AND METHOD FOR OPERATING A VACUUM PUMP SYSTEM
Title (de)
VAKUUMPUMPSYSTEM SOWIE VERFAHREN ZUM BETREIBEN EINES VAKUUMPUMPSYSTEMS
Title (fr)
SYSTÈME DE POMPE À VIDE ET SON PROCÉDÉ DE FONCTIONNEMENT
Publication
Application
Priority
- DE 202016007609 U 20161215
- EP 2017080191 W 20171123
Abstract (en)
[origin: WO2018108479A1] The invention relates to a vacuum pump system, comprising a main vacuum pump (10) that is connected to a chamber (14) that is to be evacuated. An auxiliary pump (12) is connected to an outlet of the main vacuum pump (10). Furthermore, a sealing gas supply device is connected to the main vacuum pump. The sealing gas supply device is switched on and off with the aid of a control device (20) as a function of a predetermined control variable. The invention further relates to a method for controlling the vacuum pump system.
IPC 8 full level
F04C 23/00 (2006.01); F04C 25/02 (2006.01); F04C 28/02 (2006.01); F04D 17/16 (2006.01); F04D 19/04 (2006.01); F04D 29/10 (2006.01)
CPC (source: EP KR US)
F04B 37/14 (2013.01 - US); F04B 41/06 (2013.01 - US); F04C 23/006 (2013.01 - US); F04C 23/008 (2013.01 - EP KR); F04C 25/02 (2013.01 - EP KR US); F04C 27/02 (2013.01 - US); F04C 28/02 (2013.01 - EP KR US); F04C 28/08 (2013.01 - US); F04D 17/168 (2013.01 - KR); F04D 19/04 (2013.01 - EP); F04D 19/046 (2013.01 - EP KR); F04D 27/0292 (2013.01 - EP); F04B 49/065 (2013.01 - US); F04C 23/008 (2013.01 - US); F04D 17/168 (2013.01 - US); F04D 19/046 (2013.01 - US)
Designated contracting state (EPC)
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
DOCDB simple family (publication)
DE 202016007609 U1 20180326; CN 110036204 A 20190719; EP 3555475 A1 20191023; EP 3555475 B1 20200923; JP 2020502410 A 20200123; KR 20190097019 A 20190820; US 11286934 B2 20220329; US 2019345938 A1 20191114; US 2023033429 A1 20230202; WO 2018108479 A1 20180621
DOCDB simple family (application)
DE 202016007609 U 20161215; CN 201780075018 A 20171123; EP 17803941 A 20171123; EP 2017080191 W 20171123; JP 2019531325 A 20171123; KR 20197017036 A 20171123; US 201716464721 A 20171123; US 202217672536 A 20220215