EP 3557071 B1 20210922 - VACUUM PUMP AND METHOD FOR OPERATING THE SAME
Title (en)
VACUUM PUMP AND METHOD FOR OPERATING THE SAME
Title (de)
VAKUUMPUMPE UND VERFAHREN ZUM BETREIBEN DERSELBEN
Title (fr)
POMPE À VIDE ET PROCÉDÉ DE FONCTIONNEMENT D'UNE TELLE POMPE À VIDE
Publication
Application
Priority
EP 18167557 A 20180416
Abstract (en)
[origin: JP2019183831A] To provide a vacuum pump capable of maintaining a desired temperature with high accuracy, and at the same time capable of operating with low effort.SOLUTION: A vacuum pump, in particular a turbomolecular pump (111), has at least one pump component (225), a heater (227) for heating the pump component (225), and a sensor (229) for detecting a measurement value of a pump drive unit. At that time, the sensor (229) is provided independently of the heater (227), and the heater (227) is configured for operation depending on the measurement value detected by the sensor (229).SELECTED DRAWING: Figure 1
IPC 8 full level
F04D 19/04 (2006.01); F04D 29/58 (2006.01)
CPC (source: EP)
F04D 19/042 (2013.01); F04D 27/001 (2013.01); F04D 27/02 (2013.01); F04D 27/0284 (2013.01); F04D 29/584 (2013.01)
Designated contracting state (EPC)
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
DOCDB simple family (publication)
EP 3557071 A1 20191023; EP 3557071 B1 20210922; JP 2019183831 A 20191024
DOCDB simple family (application)
EP 18167557 A 20180416; JP 2019041548 A 20190307