EP 3564538 A1 20191106 - VACUUM SYSTEM AND METHOD FOR MANUFACTURING THE SAME
Title (en)
VACUUM SYSTEM AND METHOD FOR MANUFACTURING THE SAME
Title (de)
VAKUUMSYSTEM UND VERFAHREN ZUR HERSTELLUNG EINES SOLCHEN
Title (fr)
SYSTÈME À VIDE ET PROCÉDÉ DE FABRICATION D'UN TEL SYSTÈME À VIDE
Publication
Application
Priority
EP 19158341 A 20190220
Abstract (en)
[origin: JP2020133631A] To provide a vacuum pump comprising a pump rotor arranged in a rotor housing, and a method for simplifying the manufacturing and installation of a vacuum system device.SOLUTION: Provided are a vacuum pump comprising a pump rotor arranged in a rotor housing, in particular a turbo molecular pump and/or a split flow vacuum pump, and a vacuum system having a vacuum chamber surrounded by a chamber housing, in particular a mass spectrometry system, wherein the rotor housing and the chamber housing are configured as one member by a housing body, and the housing body is an extrusion molding part.SELECTED DRAWING: Figure 1
Abstract (de)
Die Erfindung betrifft ein Vakuumsystem, insbesondere Massenspektrometriesystem, umfassend eine Vakuumpumpe, insbesondere Turbomolekular- und/oder Splitflow-Vakuumpumpe, mit einem Pumpenrotor, der in einem Rotorgehäuse angeordnet ist, und eine Vakuumkammer, die von einem Kammergehäuse umgeben ist, wobei das Rotorgehäuse und das Kammergehäuse einteilig von einem Gehäusekörper gebildet sind, und wobei der Gehäusekörper ein Strangpressteil ist.
IPC 8 full level
F04D 29/52 (2006.01); F04D 19/04 (2006.01); F04D 29/02 (2006.01); F04D 29/40 (2006.01); F04D 29/60 (2006.01); H01J 49/24 (2006.01)
CPC (source: EP)
F04D 19/042 (2013.01); F04D 29/023 (2013.01); F04D 29/403 (2013.01); F04D 29/601 (2013.01); H01J 49/24 (2013.01); F05D 2230/24 (2013.01)
Citation (search report)
- [XI] US 2018163732 A1 20180614 - COBBETT ANDREW [GB], et al
- [I] EP 3296571 A1 20180321 - PFEIFFER VACUUM GMBH [DE]
- [I] US 6336356 B1 20020108 - PAQUET JEAN MARC [FR], et al
- [A] EP 3067565 A1 20160914 - PFEIFFER VACUUM GMBH [DE]
- [A] US 6182851 B1 20010206 - DONDE ARIK [US]
- [A] DE 102014213942 A1 20160121 - DIENER CHRISTOF-HERBERT [DE]
Designated contracting state (EPC)
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
Designated extension state (EPC)
BA ME
DOCDB simple family (publication)
EP 3564538 A1 20191106; EP 3564538 B1 20210407; JP 2020133631 A 20200831; JP 7221891 B2 20230214
DOCDB simple family (application)
EP 19158341 A 20190220; JP 2020021459 A 20200212