EP 3564538 B1 20210407 - VACUUM SYSTEM AND METHOD FOR MANUFACTURING THE SAME
Title (en)
VACUUM SYSTEM AND METHOD FOR MANUFACTURING THE SAME
Title (de)
VAKUUMSYSTEM UND VERFAHREN ZUR HERSTELLUNG EINES SOLCHEN
Title (fr)
SYSTÈME À VIDE ET PROCÉDÉ DE FABRICATION D'UN TEL SYSTÈME À VIDE
Publication
Application
Priority
EP 19158341 A 20190220
Abstract (en)
[origin: JP2020133631A] To provide a vacuum pump comprising a pump rotor arranged in a rotor housing, and a method for simplifying the manufacturing and installation of a vacuum system device.SOLUTION: Provided are a vacuum pump comprising a pump rotor arranged in a rotor housing, in particular a turbo molecular pump and/or a split flow vacuum pump, and a vacuum system having a vacuum chamber surrounded by a chamber housing, in particular a mass spectrometry system, wherein the rotor housing and the chamber housing are configured as one member by a housing body, and the housing body is an extrusion molding part.SELECTED DRAWING: Figure 1
IPC 8 full level
F04D 19/04 (2006.01); F04D 29/02 (2006.01); F04D 29/40 (2006.01); F04D 29/52 (2006.01); F04D 29/60 (2006.01); H01J 49/24 (2006.01)
CPC (source: EP)
F04D 19/042 (2013.01); F04D 29/023 (2013.01); F04D 29/403 (2013.01); F04D 29/601 (2013.01); H01J 49/24 (2013.01); F05D 2230/24 (2013.01)
Citation (examination)
DE 102007027352 A1 20081218 - OERLIKON LEYBOLD VACUUM GMBH [DE]
Designated contracting state (EPC)
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
DOCDB simple family (publication)
EP 3564538 A1 20191106; EP 3564538 B1 20210407; JP 2020133631 A 20200831; JP 7221891 B2 20230214
DOCDB simple family (application)
EP 19158341 A 20190220; JP 2020021459 A 20200212