EP 3574127 A1 20191204 - TRANSPORT RING
Title (en)
TRANSPORT RING
Title (de)
TRANSPORTRING
Title (fr)
ANNEAU DE TRANSPORT
Publication
Application
Priority
- DE 102017101648 A 20170127
- DE 102017115416 A 20170710
- EP 2018051827 W 20180125
Abstract (en)
[origin: WO2018138197A1] The invention relates to a device for transporting a substrate in the form of a ring-shaped body (1) at least partially surrounding a ring opening, comprising a first section (2) protruding radially outwards in relation to the ring opening and a second section (3) protruding radially inwards, wherein the sections (2, 3) each have heat transfer properties, which determine an axial heat transfer through the sections with an axial temperature difference in relation to a surface normal of the surface of the ring opening. At least one of the heat transfer properties of the first section (2) is different from the heat transfer property of the second section (3) in such a way that the heat flowing through a unit area element in the axial direction is lower in the first section (2) than in the second section (3), wherein the heat transfer property is the specific heat conductivity or the emissivity of at least one surface of the sections (2, 3) pointing in the axial direction.
IPC 8 full level
C23C 16/458 (2006.01)
CPC (source: EP KR US)
C23C 16/4581 (2013.01 - EP KR US); C23C 16/4585 (2013.01 - EP KR US); C23C 16/4586 (2013.01 - US)
Citation (search report)
See references of WO 2018138197A1
Designated contracting state (EPC)
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
Designated extension state (EPC)
BA ME
DOCDB simple family (publication)
WO 2018138197 A1 20180802; CN 110536976 A 20191203; CN 110536976 B 20220315; EP 3574127 A1 20191204; JP 2020506290 A 20200227; JP 7107949 B2 20220727; KR 102538550 B1 20230530; KR 20190111999 A 20191002; TW 201840898 A 20181116; TW I749159 B 20211211; US 2019390336 A1 20191226
DOCDB simple family (application)
EP 2018051827 W 20180125; CN 201880016038 A 20180125; EP 18702640 A 20180125; JP 2019540344 A 20180125; KR 20197023693 A 20180125; TW 107102746 A 20180125; US 201816480596 A 20180125