EP 3578014 B1 20201028 - PLASMA SOURCE
Title (en)
PLASMA SOURCE
Title (de)
PLASMAQUELLE
Title (fr)
SOURCE DE PLASMA
Publication
Application
Priority
- FR 1750978 A 20170206
- FR 2017053798 W 20171221
Abstract (en)
[origin: WO2018142036A1] The invention relates to a plasma source comprising a quarter-wave antenna (204) arranged in a cylindrical housing (202) provided with an opening (208) facing the end of the antenna (204), in which: the diameter (d) of the antenna (204) measures between a third and a quarter of the inner diameter (d1) of the housing (202), and the distance (l) between the end of the antenna (204) and the opening (208) measures between 2/3 and 5/3 of the diameter (d) of the antenna (204).
IPC 8 full level
H05H 1/46 (2006.01)
CPC (source: EP KR US)
H01J 27/16 (2013.01 - US); H05H 1/46 (2013.01 - EP KR US); H05H 1/463 (2021.05 - EP KR); H01J 2237/0817 (2013.01 - US); H05H 1/463 (2021.05 - US); H05H 1/466 (2021.05 - US)
Designated contracting state (EPC)
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
DOCDB simple family (publication)
WO 2018142036 A1 20180809; CN 110383957 A 20191025; CN 110383957 B 20210917; DK 3578014 T3 20201130; EP 3578014 A1 20191211; EP 3578014 B1 20201028; FR 3062770 A1 20180810; FR 3062770 B1 20190329; JP 2020506526 A 20200227; JP 6847267 B2 20210324; KR 102526862 B1 20230427; KR 20190109749 A 20190926; PL 3578014 T3 20210531; US 10798810 B2 20201006; US 2019394866 A1 20191226
DOCDB simple family (application)
FR 2017053798 W 20171221; CN 201780085783 A 20171221; DK 17832280 T 20171221; EP 17832280 A 20171221; FR 1750978 A 20170206; JP 2019563692 A 20171221; KR 20197025109 A 20171221; PL 17832280 T 20171221; US 201716480063 A 20171221