EP 3578298 A1 20191211 - METHOD FOR PRODUCING SYNTHETIC QUARTZ GLASS SUBSTRATE
Title (en)
METHOD FOR PRODUCING SYNTHETIC QUARTZ GLASS SUBSTRATE
Title (de)
VERFAHREN ZUR HERSTELLUNG VON SYNTHETISCHEM QUARZGLASSUBSTRAT
Title (fr)
PROCÉDÉ DE PRODUCTION D'UN SUBSTRAT EN VERRE À QUARTZ SYNTHÉTIQUE
Publication
Application
Priority
JP 2018107892 A 20180605
Abstract (en)
The invention provides a method for producing a synthetic quartz glass substrate, the method includes arranging spacers (3) to be in contact with outer peripheral side surfaces (2) of a synthetic quartz glass substrate (1), arranging plate materials (4) to be in contact with the outer peripheral side surfaces of the spacers in a state that the plates are protruded from the surface of the substrate, and sandblasting the surface of the substrate.
IPC 8 full level
CPC (source: CN EP KR US)
B24C 1/04 (2013.01 - CN KR); B24C 1/08 (2013.01 - EP); B24C 3/32 (2013.01 - EP); B24C 9/00 (2013.01 - US); C03C 19/00 (2013.01 - KR US); B24C 1/08 (2013.01 - US)
Citation (applicant)
- JP 2004306219 A 20041104 - SHINETSU CHEMICAL CO
- JP 2018107892 A 20180705 - NSK LTD
Citation (search report)
- [YD] JP 2004306219 A 20041104 - SHINETSU CHEMICAL CO
- [Y] US 3520086 A 19700714 - STEVENS CHARLES EDWARD
- [A] JP 2000246641 A 20000912 - SONY CORP
Designated contracting state (EPC)
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
Designated extension state (EPC)
BA ME
DOCDB simple family (publication)
EP 3578298 A1 20191211; EP 3578298 B1 20210303; CN 110561277 A 20191213; CN 110561277 B 20230714; JP 2019209436 A 20191212; JP 6954231 B2 20211027; KR 102605176 B1 20231124; KR 20190138588 A 20191213; TW 202003159 A 20200116; TW I801591 B 20230511; US 11465260 B2 20221011; US 2019366510 A1 20191205
DOCDB simple family (application)
EP 19178514 A 20190605; CN 201910483955 A 20190605; JP 2018107892 A 20180605; KR 20190064239 A 20190531; TW 108119343 A 20190604; US 201916431315 A 20190604