EP 3585921 A1 20200101 - EVAPORATION SOURCE WITH COOLING ASSEMBLY
Title (en)
EVAPORATION SOURCE WITH COOLING ASSEMBLY
Title (de)
VERDAMPFUNGSQUELLE MIT KÜHLANORDNUNG
Title (fr)
SOURCE D'ÉVAPORATION AVEC ENSEMBLE DE REFROIDISSEMENT
Publication
Application
Priority
- EP 17157223 A 20170221
- EP 2018054141 W 20180220
Abstract (en)
[origin: WO2018153853A1] A modular demountable low-temperature high-output linear evaporation source (100) for depositing a semi-metal source material (75), in particular Se, on a substrate (50), the evaporation source comprising: a crucible (201) comprising: a base (203); a first plurality of walls (202) surrounding an interior region (204) of the crucible (201), the plurality of walls (202) including a first end wall (2021), a second end wall (2022) opposite to the first end wall (2021), a first side wall (2023), and a second side wall (2024) opposite to the first side wall (2023); a cooling assembly (600) comprising: a cooling plate (602) disposed below the base (203) of the crucible (201), the cooling plate (602) having a lower surface (606) including one or more grooves (608); and a first cooling tube (604) disposed in the one or more grooves (608) of the lower surface (606).
IPC 8 full level
C23C 14/24 (2006.01); C23C 14/06 (2006.01); C23C 14/54 (2006.01); C23C 14/56 (2006.01)
CPC (source: EP)
C23C 14/0623 (2013.01); C23C 14/243 (2013.01); C23C 14/541 (2013.01); C23C 14/562 (2013.01)
Citation (search report)
See references of WO 2018153853A1
Designated contracting state (EPC)
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
Designated extension state (EPC)
BA ME
DOCDB simple family (publication)
DOCDB simple family (application)
EP 2018054141 W 20180220; EP 18705007 A 20180220