EP 3592694 A1 20200115 - ELECTROSTATIC MEMS ACTUATOR AND METHOD FOR THE PRODUCTION THEREOF
Title (en)
ELECTROSTATIC MEMS ACTUATOR AND METHOD FOR THE PRODUCTION THEREOF
Title (de)
ELEKTROSTATISCHER MEMS-AKTOR UND VERFAHREN ZUM HERSTELLEN DESSELBEN
Title (fr)
ACTIONNEUR MEMS ÉLECTROSTATIQUE ET PROCÉDÉ DE FABRICATION DE CELUI-CI
Publication
Application
Priority
- DE 102017203722 A 20170307
- EP 2018055349 W 20180305
Abstract (en)
[origin: WO2018162417A1] A MEMS comprises a substrate which has a cavity, and a movable element which is arranged in the cavity and comprises a first electrode, a second electrode and a third electrode which is arranged between the first and second electrodes and is fixed in position such that it is electrically insulated from said electrodes in discrete regions. The movable element is designed to execute a movement along a movement direction in a substrate plane in response to an electrical potential between the first electrode and the third electrode or in response to an electrical potential between the second electrode and the third electrode. A dimension of the third electrode perpendicular to the substrate plane is smaller than a dimension of the first electrode and a dimension of the second electrode perpendicular to the substrate plane.
IPC 8 full level
B81B 3/00 (2006.01)
CPC (source: EP KR US)
B81B 3/0008 (2013.01 - EP KR); B81B 3/0013 (2013.01 - EP KR); B81B 3/0056 (2013.01 - EP KR US); B81C 1/00166 (2013.01 - US); B81B 2201/0257 (2013.01 - EP KR US); B81B 2201/038 (2013.01 - EP KR US); B81B 2203/0163 (2013.01 - US); B81B 2203/0315 (2013.01 - US); B81B 2203/04 (2013.01 - US); B81B 2203/051 (2013.01 - EP KR US); B81C 2201/0132 (2013.01 - US)
Citation (search report)
See references of WO 2018162417A1
Designated contracting state (EPC)
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
Designated extension state (EPC)
BA ME
DOCDB simple family (publication)
WO 2018162417 A1 20180913; CN 110621612 A 20191227; DE 102017203722 A1 20180913; DE 102017203722 B4 20211125; EP 3592694 A1 20200115; KR 20190126370 A 20191111; US 11186478 B2 20211130; US 2019382257 A1 20191219
DOCDB simple family (application)
EP 2018055349 W 20180305; CN 201880029647 A 20180305; DE 102017203722 A 20170307; EP 18709000 A 20180305; KR 20197029461 A 20180305; US 201916550823 A 20190826