EP 3597352 B1 20211124 - METHOD OF SEPARATING SOLID BODY COATINGS OF COMPOSITE STRUCTURES MADE OF SIC AND A METALLIC COATING OR ELECTRICAL COMPONENTS
Title (en)
METHOD OF SEPARATING SOLID BODY COATINGS OF COMPOSITE STRUCTURES MADE OF SIC AND A METALLIC COATING OR ELECTRICAL COMPONENTS
Title (de)
VERFAHREN ZUM ABTRENNEN VON FESTKÖRPERSCHICHTEN VON KOMPOSITSTRUKTUREN AUS SIC UND EINER METALLISCHEN BESCHICHTUNG ODER ELEKTRISCHEN BAUTEILEN
Title (fr)
PROCÉDÉ DE SÉPARATION DE COUCHES DE CORPS SOLIDE DE STRUCTURES COMPOSITES À PARTIR DE SIC ET D'UN REVÊTEMENT MÉTALLIQUE OU DE COMPOSANTS ÉLECTRIQUES
Publication
Application
Priority
DE 102018003675 A 20180504
Abstract (en)
[origin: US2019337100A1] A method for producing microcracks in an interior of a composite structure includes: providing or producing the composite structure which has a solid body and at least one metallic coating and/or electrical components situated or provided on one side of the solid body, the solid body containing or being made of silicon carbide (SiC); and producing modifications in the interior of the solid body. Laser radiation is introduced into a flat surface of the solid body to cause multiphoton excitation which brings about plasma generation. The modifications are effected by the plasma in the form of a material transformation which generates compressive stresses in the solid body, thereby developing subcritical cracks in a surrounding area of a particular modification. The laser radiation is introduced into the solid body in pulses having an intensity which reaches a maximum within 10 ns after a start of a particular pulse.
IPC 8 full level
B23K 26/00 (2014.01); B23K 26/0622 (2014.01); B23K 26/53 (2014.01); H01L 21/268 (2006.01); H01L 21/78 (2006.01); H01L 29/04 (2006.01); H01L 29/16 (2006.01); B23K 101/40 (2006.01); B23K 103/00 (2006.01); B23K 103/16 (2006.01)
CPC (source: EP US)
B23K 26/0006 (2013.01 - EP US); B23K 26/0622 (2015.10 - US); B23K 26/0624 (2015.10 - EP); B23K 26/0648 (2013.01 - US); B23K 26/0853 (2013.01 - US); B23K 26/53 (2015.10 - EP US); H01L 21/268 (2013.01 - EP); H01L 21/78 (2013.01 - EP); H01L 29/045 (2013.01 - EP); H01L 29/1608 (2013.01 - EP); B23K 26/0823 (2013.01 - US); B23K 2101/40 (2018.07 - EP); B23K 2103/172 (2018.07 - EP); B23K 2103/50 (2018.07 - EP); B23K 2103/56 (2018.07 - US); B28D 5/0011 (2013.01 - US); H01L 21/0445 (2013.01 - EP); H01L 29/1608 (2013.01 - US)
Designated contracting state (EPC)
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
DOCDB simple family (publication)
US 11772201 B2 20231003; US 2019337100 A1 20191107; DE 102018003675 A1 20191107; EP 3597352 A1 20200122; EP 3597352 B1 20211124; JP 2020015091 A 20200130; JP 7420478 B2 20240123; TW 201946722 A 20191216; TW I720378 B 20210301
DOCDB simple family (application)
US 201916402355 A 20190503; DE 102018003675 A 20180504; EP 19165685 A 20190328; JP 2019076128 A 20190412; TW 107144070 A 20181207