EP 3611381 B1 20231004 - METHOD FOR PRODUCING A VACUUM PUMP
Title (en)
METHOD FOR PRODUCING A VACUUM PUMP
Title (de)
VERFAHREN ZUR HERSTELLUNG EINER VAKUUMPUMPE
Title (fr)
PROCÉDÉ DE FABRICATION D'UNE POMPE À VIDE
Publication
Application
Priority
EP 18188711 A 20180813
Abstract (en)
[origin: JP2020026794A] To improve the resistance of adhesive connections in a vacuum pump.SOLUTION: The present invention relates to a method of producing a vacuum pump (111), in particular a turbo molecular pump. With the method, first elements (163, 165) are connected to a second element (161) by an adhesive. In this case, the first and second elements (163, 165, 161) each have first or second adhesive regions (231, 232, 233, 234) provided for an adhesive, and then at least one of the adhesive regions (231, 232, 233, 234) is at least partially treated with plasma before connection.SELECTED DRAWING: Figure 1
IPC 8 full level
F04D 19/04 (2006.01); C09J 5/02 (2006.01); F04D 29/02 (2006.01); F04D 29/32 (2006.01)
CPC (source: EP)
F04D 19/04 (2013.01); F04D 19/044 (2013.01); F04D 29/023 (2013.01); F04D 29/32 (2013.01); F05D 2230/23 (2013.01)
Citation (examination)
- JP 2013160118 A 20130819 - SHIMADZU CORP
- ANONYMOUS: "Plasma activation - Wikipedia", 21 April 2020 (2020-04-21), pages 1 - 7, XP055717631, Retrieved from the Internet <URL:https://en.wikipedia.org/wiki/Plasma_activation#> [retrieved on 20200723]
Designated contracting state (EPC)
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
DOCDB simple family (publication)
EP 3611381 A1 20200219; EP 3611381 B1 20231004; JP 2020026794 A 20200220
DOCDB simple family (application)
EP 18188711 A 20180813; JP 2019143498 A 20190805