Global Patent Index - EP 3612608 A1

EP 3612608 A1 20200226 - SELF-STOPPING POLISHING COMPOSITION AND METHOD FOR BULK OXIDE PLANARIZATION

Title (en)

SELF-STOPPING POLISHING COMPOSITION AND METHOD FOR BULK OXIDE PLANARIZATION

Title (de)

SELBSTSTOPPENDE POLIERZUSAMMENSETZUNG UND VERFAHREN ZUR OXIDMASSENPLANARISIERUNG

Title (fr)

COMPOSITION DE POLISSAGE À AUTO-ARRÊT ET PROCÉDÉ DE PLANARISATION D'OXYDE EN MASSE

Publication

EP 3612608 A1 20200226 (EN)

Application

EP 18788475 A 20180323

Priority

  • US 201762486219 P 20170417
  • US 2018024067 W 20180323

Abstract (en)

[origin: WO2018194792A1] The invention provides a chemical-mechanical polishing composition comprising an abrasive, a self-stopping agent, an aqueous carrier, and optionally, a cationic polymer, and provides a method suitable for polishing a substrate.

IPC 8 full level

C09G 1/02 (2006.01); C09G 1/04 (2006.01); C09K 3/14 (2006.01); H01L 21/306 (2006.01)

CPC (source: EP)

C09G 1/02 (2013.01); C09K 3/1463 (2013.01); H01L 21/31053 (2013.01)

Designated contracting state (EPC)

AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR

Designated extension state (EPC)

BA ME

DOCDB simple family (publication)

WO 2018194792 A1 20181025; CN 110520493 A 20191129; EP 3612608 A1 20200226; EP 3612608 A4 20210120; JP 2020517117 A 20200611; KR 20190132537 A 20191127; TW 201839077 A 20181101; TW I663231 B 20190621

DOCDB simple family (application)

US 2018024067 W 20180323; CN 201880025600 A 20180323; EP 18788475 A 20180323; JP 2019556638 A 20180323; KR 20197033492 A 20180323; TW 107110067 A 20180323