Global Patent Index - EP 3616237 A1

EP 3616237 A1 20200304 - CMP MACHINE WITH IMPROVED THROUGHPUT AND PROCESS FLEXIBILITY

Title (en)

CMP MACHINE WITH IMPROVED THROUGHPUT AND PROCESS FLEXIBILITY

Title (de)

CMP-MASCHINE MIT ERHÖHTEM DURCHSATZ UND VERBESSERTER PROZESSFLEXIBILITÄT

Title (fr)

MACHINE DE POLISSAGE MÉCANO-CHIMIQUE AYANT UN RENDEMENT AMÉLIORÉ ET UNE FLEXIBILITÉ DE TRAITEMENT AMÉLIORÉE

Publication

EP 3616237 A1 20200304 (EN)

Application

EP 18791930 A 20180406

Priority

  • US 201762602538 P 20170426
  • US 2018026590 W 20180406

Abstract (en)

[origin: US2018311784A1] An apparatus for performing chemical mechanical planarization is disclosed. The apparatus includes a support, wherein an axis of rotation extends through the support. The apparatus includes at least one elongated member including a first portion and a second portion opposed to the first portion. The first portion is configured to rotatably connect to the support and pivot the elongated member about the axis of rotation relative to the support through an angle of rotation that is at least about 270 degrees in a single direction. The apparatus includes a carrier head configured to connect to the second portion and to hold and process a substrate.

IPC 8 full level

H01L 21/673 (2006.01); B24B 7/22 (2006.01); B24B 37/10 (2012.01); B24B 37/27 (2012.01); B24B 37/34 (2012.01); B24B 41/00 (2006.01); H01L 21/677 (2006.01); H01L 21/68 (2006.01); H01L 21/683 (2006.01)

CPC (source: EP US)

B24B 27/0023 (2013.01 - EP); B24B 37/107 (2013.01 - EP US); B24B 37/30 (2013.01 - EP); B24B 37/32 (2013.01 - US); B24B 51/00 (2013.01 - EP US)

Citation (search report)

See references of WO 2018200165A1

Designated contracting state (EPC)

AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR

Designated extension state (EPC)

BA ME

DOCDB simple family (publication)

US 2018311784 A1 20181101; CN 110709980 A 20200117; EP 3616237 A1 20200304; JP 2020518475 A 20200625; KR 20200002928 A 20200108; WO 2018200165 A1 20181101

DOCDB simple family (application)

US 201815947510 A 20180406; CN 201880031946 A 20180406; EP 18791930 A 20180406; JP 2019558761 A 20180406; KR 20197033907 A 20180406; US 2018026590 W 20180406