EP 3616237 A1 20200304 - CMP MACHINE WITH IMPROVED THROUGHPUT AND PROCESS FLEXIBILITY
Title (en)
CMP MACHINE WITH IMPROVED THROUGHPUT AND PROCESS FLEXIBILITY
Title (de)
CMP-MASCHINE MIT ERHÖHTEM DURCHSATZ UND VERBESSERTER PROZESSFLEXIBILITÄT
Title (fr)
MACHINE DE POLISSAGE MÉCANO-CHIMIQUE AYANT UN RENDEMENT AMÉLIORÉ ET UNE FLEXIBILITÉ DE TRAITEMENT AMÉLIORÉE
Publication
Application
Priority
- US 201762602538 P 20170426
- US 2018026590 W 20180406
Abstract (en)
[origin: US2018311784A1] An apparatus for performing chemical mechanical planarization is disclosed. The apparatus includes a support, wherein an axis of rotation extends through the support. The apparatus includes at least one elongated member including a first portion and a second portion opposed to the first portion. The first portion is configured to rotatably connect to the support and pivot the elongated member about the axis of rotation relative to the support through an angle of rotation that is at least about 270 degrees in a single direction. The apparatus includes a carrier head configured to connect to the second portion and to hold and process a substrate.
IPC 8 full level
H01L 21/673 (2006.01); B24B 7/22 (2006.01); B24B 37/10 (2012.01); B24B 37/27 (2012.01); B24B 37/34 (2012.01); B24B 41/00 (2006.01); H01L 21/677 (2006.01); H01L 21/68 (2006.01); H01L 21/683 (2006.01)
CPC (source: EP KR US)
B24B 27/0023 (2013.01 - EP KR US); B24B 37/107 (2013.01 - EP KR US); B24B 37/30 (2013.01 - EP US); B24B 37/32 (2013.01 - KR US); B24B 37/345 (2013.01 - EP); B24B 51/00 (2013.01 - EP KR US)
Designated contracting state (EPC)
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
Designated extension state (EPC)
BA ME
DOCDB simple family (publication)
US 2018311784 A1 20181101; CN 110709980 A 20200117; EP 3616237 A1 20200304; EP 3616237 A4 20201216; JP 2020518475 A 20200625; JP 2022141653 A 20220929; JP 2024026436 A 20240228; JP 7094983 B2 20220704; JP 7408726 B2 20240105; KR 20200002928 A 20200108; US 2022088744 A1 20220324; WO 2018200165 A1 20181101
DOCDB simple family (application)
US 201815947510 A 20180406; CN 201880031946 A 20180406; EP 18791930 A 20180406; JP 2019558761 A 20180406; JP 2022099826 A 20220621; JP 2023215247 A 20231220; KR 20197033907 A 20180406; US 2018026590 W 20180406; US 202117457871 A 20211206