EP 3623634 B1 20220406 - VACUUM PUMP COMPRISING A HOLWECK PUMP STAGE AND TWO SIDE CHANNEL PUMP STAGES
Title (en)
VACUUM PUMP COMPRISING A HOLWECK PUMP STAGE AND TWO SIDE CHANNEL PUMP STAGES
Title (de)
VAKUUMPUMPE UMFASSEND EINE HOLWECKPUMPSTUFE UND ZWEI SEITENKANALPUMPSTUFEN
Title (fr)
POMPE À VIDE COMPRENANT UN ÉTAGE DE POMPE DE HOLWECK ET UNDEUX ÉTAGES DE POMPE À CANAL LATÉRAL
Publication
Application
Priority
EP 19191378 A 20190813
IPC 8 full level
F04D 19/04 (2006.01); F04D 23/00 (2006.01); F04D 29/62 (2006.01); F04D 29/64 (2006.01)
CPC (source: EP)
F04D 19/044 (2013.01); F04D 19/046 (2013.01); F04D 23/008 (2013.01); F04D 29/624 (2013.01); F04D 29/644 (2013.01)
Citation (examination)
DE 102015113821 A1 20160303 - PFEIFFER VACUUM GMBH [DE]
Designated contracting state (EPC)
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
DOCDB simple family (publication)
DOCDB simple family (application)
EP 19191378 A 20190813