EP 3629366 B1 20220511 - VACUUM SYSTEM AND VACUUM PUMP
Title (en)
VACUUM SYSTEM AND VACUUM PUMP
Title (de)
VAKUUMSYSTEM UND VAKUUMPUMPE
Title (fr)
SYSTÈME À VIDE ET POMPE À VIDE
Publication
Application
Priority
EP 20152401 A 20200117
IPC 8 full level
H01J 49/24 (2006.01); F04B 37/06 (2006.01); F04B 37/08 (2006.01); F04B 37/14 (2006.01); F04D 19/04 (2006.01)
CPC (source: EP)
F04B 37/06 (2013.01); F04B 37/08 (2013.01); F04B 37/14 (2013.01); F04D 19/042 (2013.01); F04D 19/046 (2013.01); H01J 49/24 (2013.01)
Designated contracting state (EPC)
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
DOCDB simple family (publication)
EP 3629366 A2 20200401; EP 3629366 A3 20200902; EP 3629366 B1 20220511
DOCDB simple family (application)
EP 20152401 A 20200117