EP 3652776 A1 20200520 - DRYING DEVICE AND METHOD FOR DRYING A SUBSTRATE
Title (en)
DRYING DEVICE AND METHOD FOR DRYING A SUBSTRATE
Title (de)
TROCKNUNGSVORRICHTUNG UND VERFAHREN ZUR TROCKNUNG EINES SUBSTRATS
Title (fr)
DISPOSITIF DE SÉCHAGE ET PROCÉDÉS DE SÉCHAGE D'UN SUBSTRAT
Publication
Application
Priority
- DE 102017115875 A 20170714
- DE 2018100641 W 20180712
Abstract (en)
[origin: WO2019011382A1] The invention relates to a drying device (1) comprising at least one upper drying head (2a) and at least one lower (3a) drying head, wherein the at least one upper drying head (2a) is arranged above a transport plane (8), in which objects to be dried can be transported in a transport direction (9) through the drying device (1), and wherein the at least one lower drying head (3a) is arranged below said transport plane (8), the at least one upper drying head (2a) and the at least one lower drying head (3a) comprising in each case at least one air outlet slot (4a, 5a) and the longitudinal directions of said air outlet slots (4a, 5a) essentially extending parallel to the transport plane (8) and transversely to the transport direction (9), and in which slot planes (11), in which said air outlet slots extend, intersect the transport plane (8) at angles (a) which are greater than 0° and less than 90°; and method for drying a planar substrate (7) in a continuous system.
IPC 8 full level
H01L 21/67 (2006.01); F26B 21/00 (2006.01); H01L 21/677 (2006.01); H05K 3/22 (2006.01)
CPC (source: EP KR US)
F26B 3/04 (2013.01 - EP); F26B 15/14 (2013.01 - EP US); F26B 21/004 (2013.01 - EP KR US); H01L 21/67034 (2013.01 - EP KR US); H01L 21/6776 (2013.01 - KR); H05K 3/227 (2013.01 - KR); F26B 2015/003 (2013.01 - US); H01L 21/6776 (2013.01 - EP); H05K 3/227 (2013.01 - EP)
Designated contracting state (EPC)
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
Designated extension state (EPC)
BA ME
DOCDB simple family (publication)
WO 2019011382 A1 20190117; CN 110892518 A 20200317; CN 110892518 B 20231205; EP 3652776 A1 20200520; JP 2020527689 A 20200910; JP 7273788 B2 20230515; KR 20200022501 A 20200303; TW 201908680 A 20190301; TW I788382 B 20230101; US 2020208913 A1 20200702; US 2023304735 A1 20230928; US 2023314072 A1 20231005
DOCDB simple family (application)
DE 2018100641 W 20180712; CN 201880046796 A 20180712; EP 18793166 A 20180712; JP 2020500843 A 20180712; KR 20207003733 A 20180712; TW 107124186 A 20180713; US 201816629049 A 20180712; US 202318326065 A 20230531; US 202318326067 A 20230531