EP 3658850 A1 20200603 - METHOD AND DEVICE FOR OPTICAL SURFACE MEASUREMENT BY MEANS OF A CONFOCAL SENSOR
Title (en)
METHOD AND DEVICE FOR OPTICAL SURFACE MEASUREMENT BY MEANS OF A CONFOCAL SENSOR
Title (de)
VERFAHREN UND VORRICHTUNG ZUR OPTISCHEN OBERFLÄCHENMESSUNG MIT HILFE EINES KONFOKALEN SENSORS
Title (fr)
PROCÉDÉ ET DISPOSITIF DE MESURE OPTIQUE DE SURFACES AU MOYEN D'UN CAPTEUR CONFOCAL
Publication
Application
Priority
- DE 102017116993 A 20170727
- DE 102017130211 A 20171215
- EP 2018070439 W 20180727
Abstract (en)
[origin: WO2019020800A1] The invention relates to a method and a device for the optical measurement of technical surfaces by means of a confocal sensor, where light from a light source (2) is directed towards the surface (8) of a sample to be measured by means of an optical system (5, 16). According to the invention, the optical system (5, 16) comprises an electrically controlled adaptive optics (7), wherein the focus of the optical system (5, 16) is varied by an electric signal (f (t)) in the Z-direction. The light reflected back from the sample surface (8) is directed to at least one photosensor (10), where the sensor signal is measured over time by means of a detection device (11) and the time of a signal maximum is determined. The detection device (11) derives the height Z of the surface (8) from the electric signal at the time of the signal maximum.
IPC 8 full level
G01B 11/24 (2006.01)
CPC (source: EP)
G01B 11/0608 (2013.01); G01B 11/24 (2013.01)
Citation (search report)
See references of WO 2019020800A1
Designated contracting state (EPC)
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
Designated extension state (EPC)
BA ME
DOCDB simple family (publication)
WO 2019020800 A1 20190131; CN 111065884 A 20200424; DE 102017130211 A1 20190131; EP 3658850 A1 20200603
DOCDB simple family (application)
EP 2018070439 W 20180727; CN 201880057005 A 20180727; DE 102017130211 A 20171215; EP 18756156 A 20180727