EP 3671817 A4 20210623 - CARBON CONCENTRATION MEASUREMENT METHOD
Title (en)
CARBON CONCENTRATION MEASUREMENT METHOD
Title (de)
VERFAHREN ZUR MESSUNG DER KOHLENSTOFFKONZENTRATION
Title (fr)
PROCÉDÉ DE MESURE DE CONCENTRATION EN CARBONE
Publication
Application
Priority
- JP 2017157924 A 20170818
- JP 2018028362 W 20180730
Abstract (en)
[origin: EP3671817A1] The present invention provides a method for measuring carbon concentration, the method including previously creating and preparing calibration curves each indicating a relationship between a measurement value based on a PL method and carbon concentration in accordance with respective types of starting materials of FZ single crystals, selecting a calibrating curve of the same type of starting material as a starting material of a measurement semiconductor sample, and obtaining the carbon concentration from the measurement value of the measurement semiconductor sample based on the PL method with the use of this selected calibration curve. Consequently, in the measurement based on a photoluminescence (PL) method for carbon concentration in a semiconductor sample made of a silicon single crystal (an FZ single crystal) manufactured by a floating zone (FZ) method, the method for measuring carbon concentration which is accurate even if a type of starting material differs is provided.
IPC 8 full level
H01L 21/66 (2006.01); C30B 29/06 (2006.01); G01N 21/64 (2006.01); C30B 13/00 (2006.01); C30B 15/00 (2006.01); G01N 21/27 (2006.01)
CPC (source: EP)
C30B 29/06 (2013.01); G01N 21/6489 (2013.01); C30B 13/00 (2013.01); C30B 15/00 (2013.01); G01N 21/274 (2013.01)
Citation (search report)
- [AD] JP 2015101529 A 20150604 - SHINETSU HANDOTAI KK
- [A] EP 2952883 A1 20151209 - GLOBALWAFERS JAPAN CO LTD [JP]
- [AD] JP H04344443 A 19921201 - HITACHI LTD, et al
- See references of WO 2019035343A1
Designated contracting state (EPC)
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
DOCDB simple family (publication)
EP 3671817 A1 20200624; EP 3671817 A4 20210623; EP 3671817 B1 20220504; CN 111033708 A 20200417; CN 111033708 B 20230815; DK 3671817 T3 20220801; JP 2019036661 A 20190307; JP 6693485 B2 20200513; WO 2019035343 A1 20190221
DOCDB simple family (application)
EP 18846613 A 20180730; CN 201880053331 A 20180730; DK 18846613 T 20180730; JP 2017157924 A 20170818; JP 2018028362 W 20180730