EP 3674551 A1 20200701 - VACUUM PUMP APPARATUS
Title (en)
VACUUM PUMP APPARATUS
Title (de)
VAKUUMPUMPENVORRICHTUNG
Title (fr)
APPAREIL DE POMPE À VIDE
Publication
Application
Priority
JP 2018247321 A 20181228
Abstract (en)
A vacuum pump apparatus capable of reducing an installation space of a vacuum pump and reliably restarting comprising: a pair of pump rotors (6a, 6b, 6c) arranged opposite to each other, the pair of pump rotors being a roots rotor or a claw rotor; a pair of shafts (8) fixed to the pair of pump rotors (6a, 6b, 6c), the pair of shafts (8) extending in a vertical direction; a motor (10) configured to rotate the pair of pump rotors (6a, 6b, 6c); a pair of timing gears (25) fixed to the pair of shafts (8), the pair of timing gears (25) meshing with each other; a fixed-side bearing (20, 21) arranged above the pair of pump rotors; and a free-side bearing (13) configured to support the shaft (8) together with the fixed-side bearing (20, 21).
IPC 8 full level
F04C 18/12 (2006.01); F04C 25/02 (2006.01); F04C 28/06 (2006.01)
CPC (source: CN EP KR)
F01C 21/02 (2013.01 - EP); F04B 37/14 (2013.01 - CN); F04B 37/16 (2013.01 - CN); F04C 18/123 (2013.01 - EP); F04C 18/126 (2013.01 - EP KR); F04C 23/02 (2013.01 - KR); F04C 25/02 (2013.01 - EP KR); F04C 28/06 (2013.01 - EP KR); F04C 29/0085 (2013.01 - KR); F04C 2210/22 (2013.01 - KR); F04C 2220/10 (2013.01 - KR); F04C 2240/50 (2013.01 - KR); F04C 2240/81 (2013.01 - EP); F04C 2270/19 (2013.01 - EP); F04C 2270/701 (2013.01 - EP); F04C 2280/02 (2013.01 - EP); F05B 2210/12 (2013.01 - KR); F05B 2240/50 (2013.01 - KR)
Citation (applicant)
Citation (search report)
- [XY] GB 809443 A 19590225 - HERAEUS GMBH W C
- [Y] EP 1556614 B1 20061115 - BOC GROUP PLC [GB]
- [A] US 2009097984 A1 20090416 - KIDO KOICHI [JP], et al
- [A] US 2008063536 A1 20080313 - KOSHIZAKA RYOSUKE [JP], et al
Designated contracting state (EPC)
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
Designated extension state (EPC)
BA ME
DOCDB simple family (publication)
EP 3674551 A1 20200701; EP 3674551 B1 20240124; CN 111502954 A 20200807; CN 111502954 B 20230718; JP 2020106005 A 20200709; JP 2022128522 A 20220901; JP 7141332 B2 20220922; KR 20200083239 A 20200708; TW 202032014 A 20200901; TW I826620 B 20231221
DOCDB simple family (application)
EP 19217767 A 20191218; CN 201911348087 A 20191224; JP 2018247321 A 20181228; JP 2022109672 A 20220707; KR 20190169397 A 20191218; TW 108146974 A 20191220