EP 3683590 A1 20200722 - PROBING DEVICE
Title (en)
PROBING DEVICE
Title (de)
SONDIERUNGSVORRICHTUNG
Title (fr)
DISPOSITIF DE SONDE
Publication
Application
Priority
- US 201962793060 P 20190116
- US 201916513401 A 20190716
Abstract (en)
A probing device includes a chuck configured to support a device under test (DUT), and includes a probe card disposed above the chuck. The probe card includes an inlet configured to convey a gas into the probe card, and an outlet configured to blow the gas at a predetermined temperature from the probe card toward the chuck. A method includes providing a chuck, a DUT disposed on the chuck and a probe card disposed above the DUT, and blowing a gas at a predetermined temperature from the probe card toward the DUT.
IPC 8 full level
G01R 31/28 (2006.01); G01R 1/44 (2006.01); G01R 31/319 (2006.01)
CPC (source: CN EP KR US)
G01R 1/073 (2013.01 - CN); G01R 1/07307 (2013.01 - KR); G01R 1/07342 (2013.01 - US); G01R 1/44 (2013.01 - EP); G01R 31/2862 (2013.01 - EP); G01R 31/2863 (2013.01 - KR); G01R 31/2865 (2013.01 - KR); G01R 31/2874 (2013.01 - EP KR); G01R 31/2886 (2013.01 - EP KR); G01R 31/2891 (2013.01 - KR US); G01R 31/31905 (2013.01 - EP)
Citation (search report)
- [XAI] US 4845426 A 19890704 - NOLAN CHARLES C [US], et al
- [XAI] US 2010182013 A1 20100722 - LOU CHOON LEONG [TW]
- [XAI] KR 20070005786 A 20070110 - SAMSUNG ELECTRONICS CO LTD [KR]
- [XAI] DE 202013005907 U1 20130716 - FEINMETALL GMBH [DE]
- [XAI] US 2008048700 A1 20080228 - LOU CHOON LEONG [SG], et al
- [XAI] US 2006201232 A1 20060914 - ITAKURA TOSHIKAZU [JP], et al
- [XAI] US 2014184259 A1 20140703 - ANDOH TAKEKI [JP], et al
- [XAI] JP 2002022770 A 20020123 - MICRONICS JAPAN CO LTD
- [XAI] US 2015015285 A1 20150115 - SHINOHARA EIICHI [JP], et al
- [XAI] US 2015054535 A1 20150226 - YOSHIOKA KOHJI [JP]
Designated contracting state (EPC)
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
Designated extension state (EPC)
BA ME
DOCDB simple family (publication)
EP 3683590 A1 20200722; EP 3683590 B1 20230419; CN 111443224 A 20200724; KR 102334476 B1 20211206; KR 20200089625 A 20200727; TW 202028764 A 20200801; TW I722707 B 20210321; US 11047880 B2 20210629; US 2020225266 A1 20200716
DOCDB simple family (application)
EP 20150156 A 20200103; CN 201911311625 A 20191218; KR 20200005381 A 20200115; TW 108145031 A 20191210; US 201916513401 A 20190716