EP 3686430 B1 20210714 - SYSTEM AND METHOD FOR EVACUATING A PROCESS ROOM
Title (en)
SYSTEM AND METHOD FOR EVACUATING A PROCESS ROOM
Title (de)
SYSTEM UND VERFAHREN ZUM EVAKUIEREN EINES PROZESSRAUMS
Title (fr)
SYSTÈME ET PROCÉDÉ D'ÉVACUATION D'UN ESPACE DE PROCESSUS
Publication
Application
Priority
DE 102019101769 A 20190124
Abstract (en)
[origin: US2020240405A1] A method for evacuating a process space by initially evacuating the process space to a pressure limit value using two compressors operated in parallel, and on reaching or undershooting the pressure limit value, the process space is subsequently evacuated using the two compressors operated in series.
IPC 8 full level
F04B 41/06 (2006.01); F04C 23/00 (2006.01); F04C 25/02 (2006.01)
CPC (source: CN EP US)
F04B 23/00 (2013.01 - US); F04B 25/00 (2013.01 - US); F04B 37/14 (2013.01 - CN US); F04B 41/06 (2013.01 - CN EP US); F04B 49/00 (2013.01 - CN US); F04B 49/007 (2013.01 - US); F04B 49/02 (2013.01 - CN US); F04B 49/022 (2013.01 - US); F04B 49/03 (2013.01 - CN US); F04B 49/06 (2013.01 - US); F04B 49/22 (2013.01 - US); F04C 23/001 (2013.01 - EP US); F04C 25/02 (2013.01 - EP US); F04D 15/0072 (2013.01 - US); F04D 17/14 (2013.01 - US); F04D 27/0269 (2013.01 - US); F04B 2205/01 (2013.01 - US); F04B 2205/16 (2013.01 - US)
Designated contracting state (EPC)
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
DOCDB simple family (publication)
EP 3686430 A1 20200729; EP 3686430 B1 20210714; CN 111502955 A 20200807; CN 111502955 B 20230606; DE 102019101769 A1 20200730; US 11473573 B2 20221018; US 2020240405 A1 20200730
DOCDB simple family (application)
EP 19217906 A 20191219; CN 202010065127 A 20200120; DE 102019101769 A 20190124; US 202016748281 A 20200121