EP 3688394 A1 20200805 - REAL-TIME MONITORING OF A MULTI-ZONE VERTICAL FURNACE WITH EARLY DETECTION OF A FAILURE OF A HEATING ZONE ELEMENT
Title (en)
REAL-TIME MONITORING OF A MULTI-ZONE VERTICAL FURNACE WITH EARLY DETECTION OF A FAILURE OF A HEATING ZONE ELEMENT
Title (de)
ECHTZEIT MONITORING EINES MEHRZONEN-VERTIKALOFENS MIT FRUEHZEITIGER ERKENNUNG EINES AUSFALLS EINES HEIZZONEN-ELEMENTS
Title (fr)
SURVEILLANCE EN TEMPS RÉEL D'UN FOUR VERTICAL À PLUSIEURS ZONES, DOTÉE D'UNE DÉTECTION PRÉCOCE DE L'ARRÊT D'UN ÉLÉMENT DE ZONE CHAUFFANTE
Publication
Application
Priority
- DE 102017122205 A 20170925
- DE 102018101010 A 20180118
- IB 2018057414 W 20180925
Abstract (en)
[origin: WO2019058358A1] The aim of the invention is to help avoid wafer losses in thermal treatment. Wafers have values of up to 150,000 euros per batch. Therefore, unplanned failure of the thermal device for treating the wafers should be avoided. The method according to the invention for monitoring the thermal device(s) (100) for receiving and controlling the temperature of wafer lots or batches of wafers uses a continuously applied measurement of a resistance value (R1) in at least one heating zone (1') of a plurality of heating zones (1', 2', 3', 4', 5') of the thermal device. The currently measured value (R1(i)) of the resistance (1) in the associated heating zone (1') is compared with a previously measured value (R1(i-1)) of the same resistance (1). A warning or an alarm (90) for the thermal device (100) is already generated when a deviation (ΔRi) of the two resistance values from the same heating zone (1') is detected by means of the comparison, said warning or alarm occurring temporally before a failure of a whole heating zone (1) of the thermal device (100). Improved ability to plan resources is a further goal.
IPC 8 full level
F27B 17/00 (2006.01); F27D 19/00 (2006.01); F27D 21/00 (2006.01); G01R 31/28 (2006.01); H01L 21/67 (2006.01); H04M 3/08 (2006.01); H05B 3/14 (2006.01)
CPC (source: EP KR US)
F27B 17/0025 (2013.01 - EP KR US); F27D 19/00 (2013.01 - EP KR); F27D 21/0014 (2013.01 - EP KR); G01R 27/14 (2013.01 - US); G01R 31/52 (2020.01 - EP KR US); H01L 21/67098 (2013.01 - EP KR); H01L 21/67109 (2013.01 - EP KR US); H01L 21/67248 (2013.01 - EP KR US); H01L 21/67288 (2013.01 - EP KR); H05B 1/0233 (2013.01 - EP KR); F27D 2019/0025 (2013.01 - EP KR US); G01R 27/08 (2013.01 - EP)
Designated contracting state (EPC)
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
Designated extension state (EPC)
BA ME
DOCDB simple family (publication)
WO 2019058358 A1 20190328; CN 111433547 A 20200717; DE 102018101010 A1 20190328; EP 3688394 A1 20200805; JP 2020535646 A 20201203; JP 2023109763 A 20230808; JP 7271520 B2 20230511; KR 102598971 B1 20231103; KR 20200100602 A 20200826; TW 201923368 A 20190616; TW I808996 B 20230721; US 2020411343 A1 20201231
DOCDB simple family (application)
IB 2018057414 W 20180925; CN 201880062066 A 20180925; DE 102018101010 A 20180118; EP 18799591 A 20180925; JP 2020517118 A 20180925; JP 2023071909 A 20230426; KR 20207010728 A 20180925; TW 107133185 A 20180920; US 201816649833 A 20180925