EP 3691778 A1 20200812 - CLOSURE ELEMENT FOR CLOSING A LOADING OPENING OF AN INNER HOUSING OF A CVD REACTOR
Title (en)
CLOSURE ELEMENT FOR CLOSING A LOADING OPENING OF AN INNER HOUSING OF A CVD REACTOR
Title (de)
VERSCHLUSSELEMENT ZUM VERSCHLIEßEN EINER BELADEÖFFNUNG EINES INNENGEHÄUSES EINES CVD-REAKTORS
Title (fr)
ÉLÉMENT DE FERMETURE SERVANT À FERMER UNE OUVERTURE DE CHARGEMENT D'UN CARTER INTÉRIEUR D'UN RÉACTEUR CVD
Publication
Application
Priority
- DE 102017123231 A 20171006
- EP 2018076792 W 20181002
Abstract (en)
[origin: WO2019068709A1] The invention relates to a CVD reactor having a gas-tight and evacuatable reactor housing (1) and an inner housing (2) arranged therein, which inner housing has means (3, 4) for the infeed of a process gas and means (5) for holding a substrate (6) for treatment in the inner housing by means of the process gases, wherein the inner housing (2) has a loading opening (7) which can be closed off by a sealing element (11) of the closure element (10), and the sealing element (10), in its closure position, bears with an encircling sealing zone (10') against a counterpart sealing zone (7) which encircles the loading opening (7) on the outer side of the inner housing (2), wherein the sealing element (11) is fastened to a carrier (12) as to be adjustable in terms of inclination and/or pivotally movable about at least one spatial axis (X, Y, Z) and/or so as to be elastically deflectable in the direction of one of the spatial axes (X, Y, Z).
IPC 8 full level
B01J 3/03 (2006.01); C23C 16/44 (2006.01); F16K 51/02 (2006.01); H01L 21/67 (2006.01)
CPC (source: EP KR US)
B01J 3/03 (2013.01 - EP); C23C 16/4409 (2013.01 - EP KR US); F16K 3/18 (2013.01 - EP KR US); F16K 3/314 (2013.01 - EP KR US); F16K 51/02 (2013.01 - EP KR); H01L 21/67126 (2013.01 - EP US); H01L 21/6719 (2013.01 - US); B01J 3/03 (2013.01 - KR); H01L 21/67126 (2013.01 - KR)
Designated contracting state (EPC)
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
Designated extension state (EPC)
BA ME
DOCDB simple family (publication)
WO 2019068709 A1 20190411; CN 111417458 A 20200714; CN 111417458 B 20240223; DE 102017123231 A1 20190411; EP 3691778 A1 20200812; KR 20200064104 A 20200605; TW 201922342 A 20190616; TW I810209 B 20230801; US 11702740 B2 20230718; US 2020318235 A1 20201008
DOCDB simple family (application)
EP 2018076792 W 20181002; CN 201880077822 A 20181002; DE 102017123231 A 20171006; EP 18782949 A 20181002; KR 20207012200 A 20181002; TW 107135107 A 20181004; US 201816652647 A 20181002