EP 3693610 B1 20211222 - MOLECULAR VACUUM PUMP
Title (en)
MOLECULAR VACUUM PUMP
Title (de)
MOLEKULARVAKUUMPUMPE
Title (fr)
POMPE À VIDE MOLÉCULAIRE
Publication
Application
Priority
EP 20153779 A 20200127
Abstract (en)
[origin: JP2021116806A] To improve discharge of gas existing in an intermediate port, and/or reduce backflow of gas in a direction opposite to a pump direction starting from the intermediate port.SOLUTION: A molecular vacuum pump comprises at least one molecular pump stage and one intermediate port. The pump stage allows gas to be transferred from the inlet to the outlet of the molecular vacuum pump. The pump stage has one pump direction, and one passage cross section lateral to this pump direction. The intermediate port is located in the pump stage or on the downstream side of the pump stage. In the molecular vacuum pump, a particularly static blocking element is arranged in front of the intermediate port in the pump direction, and the blocking element locally reduces the passage cross section.SELECTED DRAWING: Figure 8
IPC 8 full level
F04D 19/04 (2006.01); F04D 29/52 (2006.01)
CPC (source: EP)
F04D 19/04 (2013.01); F04D 29/522 (2013.01)
Designated contracting state (EPC)
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
DOCDB simple family (publication)
EP 3693610 A1 20200812; EP 3693610 B1 20211222; EP 3851680 A1 20210721; EP 3851680 B1 20230913; JP 2021116806 A 20210810; JP 2021116814 A 20210810; JP 6998439 B2 20220118; JP 7252990 B2 20230405
DOCDB simple family (application)
EP 20153779 A 20200127; EP 20217527 A 20201229; JP 2020178180 A 20201023; JP 2021009273 A 20210125