EP 3701728 A1 20200902 - SOUND TRANSDUCER ARRANGEMENT
Title (en)
SOUND TRANSDUCER ARRANGEMENT
Title (de)
SCHALLWANDLERANORDNUNG
Title (fr)
ENSEMBLE FORMANT TRANSDUCTEUR ACOUSTIQUE
Publication
Application
Priority
- DE 102017125117 A 20171026
- EP 2018077821 W 20181012
Abstract (en)
[origin: WO2019081220A1] The invention relates to a MEMS sound transducer (1), in particular for generating and/or detecting sound waves in the audible wavelength spectrum, comprising: a substrate (2); a diaphragm (3) that is connected to the substrate (2) and can be deflected relative to same along a stroke axis (4a, 4b); at least one piezo-element (5a, 5b) spaced apart from the diaphragm (3) in the direction of the stroke axis (4), which is for generating and/or detecting a deflection of the diaphragm (3), and which has a first end (6a, 6b) connected to the substrate (2) and a second end (7a, 7b) that can be deflected in the direction of the stroke axis (4a, 4b); and a coupling element (8a, 8b) which extends in the direction of the stroke axis (4a, 4b) between the piezo-element (5a, 5b) and the diaphragm (3) and connects the second end (7a, 7b) of the piezo-element (5a, 5b) to the diaphragm (3). In addition, the at least one piezo-element (5a, 5b) and the coupling element (8a, 8b) together form a cantilever (9a, 9b) which is clamped on one side and has a clamped end (10a, 10b) formed by the first end (6a, 6b) of the piezo-element (5a, 5b) and a free end (11a, 11b) formed by the coupling element (8a, 8b). The MEMS sound transducer (1) also comprises multiple cantilevers (9a, 9b). According to the invention, at least two cantilevers (9a, 9b) are arranged behind one another when viewed from above.
IPC 8 full level
H04R 17/00 (2006.01)
CPC (source: EP KR US)
H04R 17/00 (2013.01 - EP KR); H04R 19/02 (2013.01 - US); H04R 19/04 (2013.01 - US); H04R 2201/003 (2013.01 - EP KR US)
Citation (search report)
See references of WO 2019081220A1
Designated contracting state (EPC)
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
Designated extension state (EPC)
BA ME
DOCDB simple family (publication)
WO 2019081220 A1 20190502; CA 3080268 A1 20190502; CN 111567063 A 20200821; CN 111567063 B 20220628; DE 102017125117 A1 20190502; EP 3701728 A1 20200902; KR 20200090774 A 20200729; SG 11202003643V A 20200528; TW 201924365 A 20190616; US 11202155 B2 20211214; US 2020351595 A1 20201105
DOCDB simple family (application)
EP 2018077821 W 20181012; CA 3080268 A 20181012; CN 201880067116 A 20181012; DE 102017125117 A 20171026; EP 18786303 A 20181012; KR 20207014316 A 20181012; SG 11202003643V A 20181012; TW 107136941 A 20181019; US 201816758631 A 20181012