EP 3714330 A1 20200930 - POROUS GRAPHITIC PELLICLE
Title (en)
POROUS GRAPHITIC PELLICLE
Title (de)
PORÖSES GRAPHITISCHES PELLIKEL
Title (fr)
PELLICULE GRAPHITIQUE POREUSE
Publication
Application
Priority
- EP 17202767 A 20171121
- EP 2018080415 W 20181107
Abstract (en)
[origin: WO2019101517A1] A method of manufacturing a pellicle for a lithographic apparatus, said method comprising growing the pellicle in a three-dimensional template and pellicles manufactured according to this method. Also disclosed is the use of a pellicle manufactured according to the method in an EUV lithography apparatus as well as the use of a three-dimensional template in the manufacture of a pellicle.
IPC 8 full level
G03F 7/20 (2006.01)
CPC (source: EP KR)
G03F 1/62 (2013.01 - EP KR); G03F 7/70191 (2013.01 - EP KR); G03F 7/70575 (2013.01 - EP KR); G03F 7/70983 (2013.01 - EP KR)
Designated contracting state (EPC)
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
Designated extension state (EPC)
BA ME
DOCDB simple family (publication)
WO 2019101517 A1 20190531; CN 111373328 A 20200703; CN 111373328 B 20230609; EP 3714330 A1 20200930; JP 2021504731 A 20210215; JP 7252950 B2 20230405; KR 20200087774 A 20200721; NL 2021947 A 20190524; NL 2021947 B1 20190906; NL 2021947 B9 20190930; NL 2023649 A 20190910; NL 2023649 B1 20200506; TW 201932988 A 20190816; TW I840338 B 20240501
DOCDB simple family (application)
EP 2018080415 W 20181107; CN 201880075083 A 20181107; EP 18796955 A 20181107; JP 2020521289 A 20181107; KR 20207014407 A 20181107; NL 2021947 A 20181107; NL 2023649 A 20190816; TW 107140960 A 20181119