EP 3720985 A1 20201014 - METHOD AND DEVICE FOR AUTOMATICALLY DETERMINING VALUES OF ADJUSTMENTS TO OPERATING PARAMETERS OF A DEPOSITION LINE
Title (en)
METHOD AND DEVICE FOR AUTOMATICALLY DETERMINING VALUES OF ADJUSTMENTS TO OPERATING PARAMETERS OF A DEPOSITION LINE
Title (de)
VERFAHREN UND VORRICHTUNG ZUR AUTOMATISCHEN BESTIMMUNG VON WERTEN DER ANPASSUNG VON BETRIEBSPARAMETERN EINER BESCHICHTUNGSANLAGE
Title (fr)
PROCEDE ET DISPOSITIF DE DETERMINATION AUTOMATIQUE DE VALEURS D'AJUSTEMENT DE PARAMETRES DE FONCTIONNEMENT D'UNE LIGNE DE DEPOT
Publication
Application
Priority
- FR 1761786 A 20171207
- FR 2018053163 W 20181207
Abstract (en)
[origin: WO2019110948A1] The determining method according to the invention comprises: — obtaining (E10) a mathematical model relating at least one operating parameter of the deposition line to at least one quality function defined on the basis of at least one quality measurement characterising the quality of a stack of thin layers deposited by the deposition line on a transparent substrate; — obtaining (E50) a value of said at least one quality function from a value of said at least one quality measurement measured at the end of the deposition line on a stack of thin layers deposited by the deposition line on a substrate with the deposition line parameterised with a so-called current value of said at least one operating parameter; and — automatically determining (E80) by means of the mathematical model a value of an adjustment of the current value of said at least one operating parameter allowing a discrepancy existing between the obtained value of said at least one quality function and a target value chosen for said at least one quality function for the stack of thin layers to be decreased.
IPC 8 full level
C23C 14/54 (2006.01); C23C 14/34 (2006.01); C23C 16/52 (2006.01); G01B 11/06 (2006.01); G02B 1/10 (2015.01)
CPC (source: EP US)
C23C 14/3492 (2013.01 - EP US); C23C 14/35 (2013.01 - US); C23C 14/54 (2013.01 - EP); C23C 14/547 (2013.01 - EP US); C23C 16/52 (2013.01 - EP); G01B 11/0625 (2013.01 - EP); G05B 17/02 (2013.01 - US); H01J 37/3464 (2013.01 - US); H01J 2237/24592 (2013.01 - US)
Citation (search report)
See references of WO 2019110948A1
Designated contracting state (EPC)
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
Designated extension state (EPC)
BA ME
DOCDB simple family (publication)
WO 2019110948 A1 20190613; BR 112020011322 A2 20201117; CN 111670264 A 20200915; EP 3720985 A1 20201014; FR 3074906 A1 20190614; FR 3074906 B1 20240119; MX 2020005919 A 20201028; RU 2020121298 A 20220114; RU 2020121298 A3 20220114; TW 201936958 A 20190916; US 11739417 B2 20230829; US 2020392617 A1 20201217
DOCDB simple family (application)
FR 2018053163 W 20181207; BR 112020011322 A 20181207; CN 201880088871 A 20181207; EP 18833275 A 20181207; FR 1761786 A 20171207; MX 2020005919 A 20181207; RU 2020121298 A 20181207; TW 107144220 A 20181207; US 201816770818 A 20181207