EP 3734078 B1 20220112 - TURBOMOLECULAR PUMP AND METHOD OF MANUFACTURING A STATOR DISC FOR SUCH A PUMP
Title (en)
TURBOMOLECULAR PUMP AND METHOD OF MANUFACTURING A STATOR DISC FOR SUCH A PUMP
Title (de)
TURBOMOLEKULARPUMPE UND VERFAHREN ZUR HERSTELLUNG EINER STATORSCHEIBE FÜR EINE SOLCHE
Title (fr)
POMPE TURBOMOLÉCULAIRE ET PROCÉDÉ DE FABRICATION D'UN DISQUE DE STATOR POUR UNE TELLE POMPE
Publication
Application
Priority
EP 20161194 A 20200305
Abstract (en)
[origin: JP2021139361A] To reduce an axial mounting space of a stator disk manufactured from sheet metal without particularly limiting the vacuum performance.SOLUTION: The present invention resides in a turbo molecular pump (111) having a rotor with a plurality of rotor blades distributedly arranged around periphery, and at least one stator disk with a plurality of stator blades distributedly arranged around periphery, in which the rotor can be driven to rotate about a rotation axis to generate pumping action, the rotor cooperates with the stator disk to generate the pumping action, and the stator blades of the stator disk oriented obliquely with respect to a disk plane extending perpendicular to the rotation axis of the rotor. The stator disk is manufactured from sheet metal, and at least one stator blade has a flattened portion at an end in the axial direction.SELECTED DRAWING: Figure 9
IPC 8 full level
F04D 19/04 (2006.01); F04D 29/02 (2006.01); F04D 29/54 (2006.01); F04D 29/64 (2006.01)
CPC (source: EP)
F04D 19/042 (2013.01); F04D 29/023 (2013.01); F04D 29/542 (2013.01); F04D 29/544 (2013.01); F04D 29/644 (2013.01); F05D 2230/54 (2013.01)
Designated contracting state (EPC)
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
DOCDB simple family (publication)
EP 3734078 A2 20201104; EP 3734078 A3 20201223; EP 3734078 B1 20220112; JP 2021139361 A 20210916; JP 7016398 B2 20220204
DOCDB simple family (application)
EP 20161194 A 20200305; JP 2020184349 A 20201104