EP 3765653 A1 20210120 - CARRIER WITH VERTICAL GRID FOR SUPPORTING SUBSTRATES IN COATER
Title (en)
CARRIER WITH VERTICAL GRID FOR SUPPORTING SUBSTRATES IN COATER
Title (de)
TRÄGER MIT VERTIKALEM GITTER ZUM TRAGEN VON SUBSTRATEN IN EINEM BESCHICHTER
Title (fr)
SUPPORT AVEC GRILLE VERTICALE POUR SOUTENIR DES SUBSTRATS DANS UN DISPOSITIF D'ENDUCTION
Publication
Application
Priority
- US 201862642525 P 20180313
- US 201862681008 P 20180605
- US 2019021227 W 20190307
Abstract (en)
[origin: WO2019177871A1] Various embodiments herein relate to carriers for supporting one or more substrate as the substrates are passed through a processing apparatus. In many cases, the substrates are oriented in a vertical manner. The carrier may include a frame and vertical support bars that secure the glass to the frame. The carrier may lack horizontal support bars. The carrier may allow for thermal expansion and contraction of the substrates, without any need to provide precise gaps between adjacent pairs of substrates. The carriers described herein substantially reduce the risk of breaking the processing apparatus and substrates, thereby achieving a more efficient process. Certain embodiments herein relate to methods of loading substrates onto a carrier.
IPC 8 full level
C23C 14/50 (2006.01); C23C 16/458 (2006.01); H01L 21/677 (2006.01)
CPC (source: CN EP)
C23C 14/50 (2013.01 - CN EP); C23C 16/4587 (2013.01 - EP); G02F 1/153 (2013.01 - CN); G03F 7/16 (2013.01 - CN); H01L 21/6715 (2013.01 - EP); H01L 21/67712 (2013.01 - EP); H01L 21/67754 (2013.01 - EP); H01L 21/6776 (2013.01 - EP); H01L 21/68728 (2013.01 - EP); H01L 21/68764 (2013.01 - EP)
Designated contracting state (EPC)
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
Designated extension state (EPC)
BA ME
DOCDB simple family (publication)
WO 2019177871 A1 20190919; CN 111868295 A 20201030; CN 111868295 B 20230811; CN 117026195 A 20231110; EP 3765653 A1 20210120; TW 201940246 A 20191016; TW 202332513 A 20230816; TW I799531 B 20230421
DOCDB simple family (application)
US 2019021227 W 20190307; CN 201980018837 A 20190307; CN 202311023061 A 20190307; EP 19712449 A 20190307; TW 108108191 A 20190312; TW 112113685 A 20190312