EP 3768880 A1 20210127 - PROCESS FOR ELECTRODEPOSITION OF COBALT
Title (en)
PROCESS FOR ELECTRODEPOSITION OF COBALT
Title (de)
VERFAHREN ZUR GALVANISCHEN ABSCHEIDUNG VON KOBALT
Title (fr)
PROCÉDÉ D'ÉLECTRODÉPOSITION DE COBALT
Publication
Application
Priority
- FR 1852386 A 20180320
- FR 1855300 A 20180615
- US 201962789554 P 20190108
- EP 2019056593 W 20190315
Abstract (en)
[origin: WO2019179897A1] The present invention relates to a process for the fabrication of cobalt interconnections and to an electrolyte which enables the implementation thereof. The electrolyte which has a pH below 4.0 comprises cobalt ions, chloride ions and at most two organic additives of low molecular weight. One of these additives may be an alpha-hydroxy carboxylic acid or a compound having a pKa value ranging from 1.8 to 3.5.
IPC 8 full level
C25D 7/12 (2006.01); C25D 3/12 (2006.01); C25D 5/50 (2006.01); H01L 21/288 (2006.01); H01L 21/768 (2006.01)
CPC (source: EP IL KR)
C25D 3/12 (2013.01 - EP IL KR); C25D 5/02 (2013.01 - KR); C25D 5/50 (2013.01 - EP IL KR); C25D 7/123 (2013.01 - EP IL KR); H01L 21/2885 (2013.01 - EP IL KR); H01L 21/76877 (2013.01 - EP IL KR); H01L 21/76879 (2013.01 - EP)
Citation (search report)
See references of WO 2019179897A1
Designated contracting state (EPC)
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
Designated extension state (EPC)
BA ME
DOCDB simple family (publication)
WO 2019179897 A1 20190926; CN 111771016 A 20201013; CN 111771016 B 20230523; EP 3768880 A1 20210127; TW 201940746 A 20191016; TW I804593 B 20230611
DOCDB simple family (application)
EP 2019056593 W 20190315; CN 201980015252 A 20190315; EP 19710697 A 20190315; TW 108109546 A 20190320