Title (en)

DEVICE FOR SEALING TWO SPACES FILLED WITH DIFFERENT FLUIDS IN A MEMS SENSOR ASSEMBLY

Title (de)

VORRICHTUNG ZUR ABDICHTUNG ZWEIER MIT UNTERSCHIEDLICHEN FLUIDEN GEFÜLLTER RÄUME BEI EINER MEMS-SENSORANORDNUNG

Title (fr)

DISPOSITIF D'ÉTANCHÉITÉ DE DEUX ESPACES REMPLIS DE FLUIDES DIFFÉRENTS DANS UN SYSTÈME DE CAPTEURS À MEMS

Publication

EP 3784931 A1 20210303 (DE)

Application

EP 19720463 A 20190415

Priority

• DE 102018206477 A 20180426
• EP 2019059684 W 20190415

Abstract (en)

[origin: WO2019206721A1] The invention relates to a sealing device (1) for sealing a space (2) filled with a fluid in a MEMS sensor assembly, comprising a sealing unit (4) wherein the sealing unit (4) has a channel (5) that is connected to the one space (2), and wherein a sealing element (6) is arranged in the channel (5) for sealing the channel (5) in such a way that the channel (5) and/or the sealing element (6) are designed in such a way that the sealing element (6) is sealingly fixed in the channel (5) via a mechanical clamping.

IPC 8 full level

F16J 15/02 (2006.01); F16J 15/06 (2006.01); F16L 55/13 (2006.01); G01L 19/00 (2006.01)

CPC (source: EP US)

B81B 3/0059 (2013.01 - US); F16J 15/028 (2013.01 - EP US); F16J 15/062 (2013.01 - EP US); F16J 15/064 (2013.01 - EP US); F16L 55/13 (2013.01 - EP US); G01L 19/0046 (2013.01 - EP US); B81B 2201/0264 (2013.01 - US)

Designated contracting state (EPC)

AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR

Designated extension state (EPC)

BA ME

DOCDB simple family (publication)

DE 102018206477 B3 20190207; CN 112041597 A 20201204; CN 112041597 B 20231003; EP 3784931 A1 20210303; JP 2021522493 A 20210830; JP 6997344 B2 20220117; US 11796060 B2 20231024; US 2021018096 A1 20210121; WO 2019206721 A1 20191031

DOCDB simple family (application)

DE 102018206477 A 20180426; CN 201980028265 A 20190415; EP 19720463 A 20190415; EP 2019059684 W 20190415; JP 2020559497 A 20190415; US 201917040333 A 20190415