Global Patent Index - EP 3790364 A1

EP 3790364 A1 20210310 - AN IMPROVED HIGH HARMONIC GENERATION APPARATUS

Title (en)

AN IMPROVED HIGH HARMONIC GENERATION APPARATUS

Title (de)

VERBESSERTE VORRICHTUNG ZUR ERZEUGUNG VON HOHEN HARMONISCHEN

Title (fr)

APPAREIL DE GÉNÉRATION D'HARMONIQUES ÉLEVÉES AMÉLIORÉ

Publication

EP 3790364 A1 20210310 (EN)

Application

EP 19195502 A 20190905

Priority

EP 19195502 A 20190905

Abstract (en)

A high harmonic generation assembly and method for generating high harmonic radiation. The assembly comprises a cavity configured to receive input radiation and increase the intensity of the input radiation inside the cavity for forming drive radiation suitable for use in high harmonic generation. The assembly further comprises an interaction region within the cavity at which, in use, a medium is present, the medium being configured to generate harmonic radiation by high harmonic generation when the drive radiation is incident thereupon, and an optical assembly configured to direct the drive radiation to pass through the interaction region, and comprising an output coupler comprising an aperture through which at least a part of the generated harmonic radiation is able to exit the cavity. The the optical assembly is further configured to shape the drive radiation into a converging hollow beam before the drive radiation passes through the interaction region.

IPC 8 full level

H05G 2/00 (2006.01)

CPC (source: EP)

H05G 2/00 (2013.01)

Citation (applicant)

Citation (search report)

  • [X] US 2011140009 A1 20110616 - KAERTNER FRANZ X [US], et al
  • [XA] KEVIN D. MOLL ET AL: "Output coupling methods for cavity-based high-harmonic generation", OPTICS EXPRESS, vol. 14, no. 18, 1 January 2006 (2006-01-01), pages 8189, XP055021815, ISSN: 1094-4087, DOI: 10.1364/OE.14.008189
  • [X] WILLIAM P. PUTNAM ET AL: "Bessel-Gauss beam enhancement cavities for high-intensity applications", OPTICS EXPRESS, vol. 20, no. 22, 22 October 2012 (2012-10-22), pages 24429, XP055076284, ISSN: 1094-4087, DOI: 10.1364/OE.20.024429
  • [X] WU J ET AL: "CAVITY-ENHANCED NONCOLLINEAR HIGH-HARMONIC GENERATION FOR EXTREME ULTRAVIOLET FREQUENCY COMBS", OPTICS LETTERS, OPTICAL SOCIETY OF AMERICA, US, vol. 32, no. 22, 15 November 2007 (2007-11-15), pages 3315 - 3317, XP001509391, ISSN: 0146-9592, DOI: 10.1364/OL.32.003315
  • [I] LABAYE FRANCOIS ET AL: "XUV Sources Based on Intra-Oscillator High Harmonic Generation With Thin-Disk Lasers: Current Status and Prospects", IEEE JOURNAL OF SELECTED TOPICS IN QUANTUM ELECTRONICS, IEEE SERVICE CENTER, PISCATAWAY, NJ, US, vol. 25, no. 4, 1 July 2019 (2019-07-01), pages 1 - 19, XP011738316, ISSN: 1077-260X, [retrieved on 20190805], DOI: 10.1109/JSTQE.2019.2926024
  • [L] F. LABAYE ET AL: "Extreme ultraviolet light source at a megahertz repetition rate based on high-harmonic generation inside a mode-locked thin-disk laser oscillator", OPTICS LETTERS, vol. 42, no. 24, 8 December 2017 (2017-12-08), US, pages 5170, XP055679626, ISSN: 0146-9592, DOI: 10.1364/OL.42.005170
  • [L] I. PUPEZA ET AL: "Compact high-repetition-rate source of coherent 100 eV radiation", NATURE PHOTONICS, vol. 7, no. 8, 7 July 2013 (2013-07-07), UK, pages 608 - 612, XP055678941, ISSN: 1749-4885, DOI: 10.1038/nphoton.2013.156
  • [L] K D MOLL ET AL: "Nonlinear dynamics inside femtosecond enhancement cavities", OPTICS EXPRESS, 7 March 2005 (2005-03-07), pages 1672 - 1678, XP055678944, Retrieved from the Internet <URL:https://www.osapublishing.org/DirectPDFAccess/D8B2BBBD-FD24-8456-42AABB5E2E5F7FBC_82922/oe-13-5-1672.pdf?da=1&id=82922&seq=0&mobile=no> [retrieved on 20200323]

Designated contracting state (EPC)

AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR

Designated extension state (EPC)

BA ME

DOCDB simple family (publication)

EP 3790364 A1 20210310

DOCDB simple family (application)

EP 19195502 A 20190905