EP 3794159 A2 20210324 - CONTINUOUS FLOW SYSTEM AND METHOD FOR COATING SUBSTRATES
Title (en)
CONTINUOUS FLOW SYSTEM AND METHOD FOR COATING SUBSTRATES
Title (de)
DURCHLAUFANLAGE UND VERFAHREN ZUM BESCHICHTEN VON SUBSTRATEN
Title (fr)
INSTALLATION À FLUX CONTINU ET PROCÉDÉ DE REVÊTEMENT DE SUBSTRATS
Publication
Application
Priority
- DE 102018004086 A 20180518
- EP 2019058505 W 20190404
Abstract (en)
[origin: WO2019219292A2] The invention relates to a continuous flow system (100) for coating substrates (103) comprising a treatment module (130) and a vacuum sluice (110, 150) for introducing the substrates (103) or for discharging the substrates (103). The vacuum sluice (110, 150) has a chamber for receiving a substrate carrier (102) having a plurality of substrates (103) and a flow channel arrangement for evacuating and flooding the chamber. The flow channel arrangement comprises a first channel for evacuating and flooding the chamber and a second channel for evacuating and flooding the chamber, wherein the first channel and the second channel are arranged on opposite sides of the chamber.
IPC 8 full level
C23C 14/56 (2006.01); C23C 16/34 (2006.01); C23C 16/54 (2006.01); H01L 21/02 (2006.01); H01L 21/67 (2006.01); H01L 21/677 (2006.01)
CPC (source: EP US)
C23C 14/0652 (2013.01 - US); C23C 14/3407 (2013.01 - US); C23C 14/566 (2013.01 - EP US); C23C 14/568 (2013.01 - EP US); C23C 16/345 (2013.01 - EP); C23C 16/50 (2013.01 - US); C23C 16/54 (2013.01 - EP US); H01J 37/32788 (2013.01 - US); H01J 37/32834 (2013.01 - US); H01J 37/34 (2013.01 - US); H01L 21/67017 (2013.01 - EP); H01L 21/67173 (2013.01 - EP); H01L 21/6719 (2013.01 - EP); H01L 21/67201 (2013.01 - EP); H01L 21/67706 (2013.01 - EP US); H01L 21/6776 (2013.01 - EP US); H01L 31/022425 (2013.01 - EP); H01L 31/1804 (2013.01 - EP US); H01J 2237/332 (2013.01 - US); H01L 31/022425 (2013.01 - US); Y02E 10/547 (2013.01 - EP); Y02P 70/50 (2015.11 - EP)
Designated contracting state (EPC)
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
Designated extension state (EPC)
BA ME
DOCDB simple family (publication)
DE 102018004086 A1 20191121; CN 112236544 A 20210115; EP 3794159 A2 20210324; TW 202012673 A 20200401; TW I793303 B 20230221; US 2021335585 A1 20211028; WO 2019219292 A2 20191121; WO 2019219292 A3 20200116
DOCDB simple family (application)
DE 102018004086 A 20180518; CN 201980033337 A 20190404; EP 19716864 A 20190404; EP 2019058505 W 20190404; TW 108112812 A 20190412; US 201917056739 A 20190404