EP 3803511 A1 20210414 - MEASURING ASSEMBLY FOR THE FREQUENCY-BASED DETERMINATION OF THE POSITION OF A COMPONENT
Title (en)
MEASURING ASSEMBLY FOR THE FREQUENCY-BASED DETERMINATION OF THE POSITION OF A COMPONENT
Title (de)
MESSANORDNUNG ZUR FREQUENZBASIERTEN POSITIONSBESTIMMUNG EINER KOMPONENTE
Title (fr)
ARRANGEMENT DE MESURE POUR DÉTERMINATION BASÉE SUR LA FRÉQUENCE DE LA POSITION D'UN COMPOSANT
Publication
Application
Priority
- DE 102018208147 A 20180524
- EP 2019061038 W 20190430
Abstract (en)
[origin: WO2019223968A1] The invention relates to a measuring assembly for the frequency-based determination of the position of a component, in particular in an optical system for microlithography, having at least one optical resonator, said resonator comprising a stationary, first resonator mirror, a movable measuring target associated with the component and a stationary, second resonator mirror, the second resonator mirror being formed by an inverting mirror (130, 330, 430, 530) which reflects back into itself a measuring beam coming from the measuring target.
IPC 8 full level
G03F 7/20 (2006.01); G01B 9/02 (2006.01); G01B 11/14 (2006.01)
CPC (source: EP KR US)
G01B 9/02003 (2013.01 - EP KR US); G01B 9/02008 (2013.01 - EP KR US); G01B 9/02018 (2013.01 - EP KR US); G01B 9/02019 (2013.01 - EP KR US); G03F 7/70775 (2013.01 - EP KR US); G03F 7/7085 (2013.01 - EP KR US)
Designated contracting state (EPC)
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
Designated extension state (EPC)
BA ME
DOCDB simple family (publication)
WO 2019223968 A1 20191128; CN 112204471 A 20210108; CN 112204471 B 20231226; CN 118151496 A 20240607; DE 102018208147 A1 20191128; EP 3803511 A1 20210414; JP 2021524033 A 20210909; JP 7159352 B2 20221024; KR 102501932 B1 20230223; KR 20200143482 A 20201223; US 11274914 B2 20220315; US 2021080244 A1 20210318
DOCDB simple family (application)
EP 2019061038 W 20190430; CN 201980034620 A 20190430; CN 202410080506 A 20190430; DE 102018208147 A 20180524; EP 19724359 A 20190430; JP 2020564422 A 20190430; KR 20207033318 A 20190430; US 202017102503 A 20201124