EP 3807441 A1 20210421 - PLASMA BOAT FOR RECEIVING WAFERS WITH REGULATED PLASMA DEPOSITION
Title (en)
PLASMA BOAT FOR RECEIVING WAFERS WITH REGULATED PLASMA DEPOSITION
Title (de)
PLASMABOOT ZUR AUFNAHME VON WAFERN MIT REGULIERTER PLASMAABSCHEIDUNG
Title (fr)
BAC À PLASMA POUR RECEVOIR DES PLAQUETTES AVEC DÉPÔT DE PLASMA RÉGULÉ
Publication
Application
Priority
- DE 102018114159 A 20180613
- EP 2019065492 W 20190613
Abstract (en)
[origin: WO2019238821A1] The invention relates to a plasma boat for receiving wafers with partial damping of the plasma deposition, consisting of a number of boat plates spaced apart in parallel, which are provided with wafer holders for receiving upright wafers, in order to securely hold the wafers during transport and during the depositing process in a coating chamber, and wherein the boat plates are mechanically connected to one another by electrically insulating spacers. The invention is intended to provide a plasma boat, with regulated plasma deposition, which ensures a deposition on wafers that is uniform over the surface area thereof and has a constant layer thickness. This is achieved by a damping element (12) being respectively arranged between the wafer holders (16) located parallel to one another, between adjacent boat plates (15), and electrically insulated with respect to the latter on spacer elements (2).
IPC 8 full level
C23C 14/24 (2006.01); C23C 16/458 (2006.01); C23C 16/50 (2006.01); H01L 21/673 (2006.01)
CPC (source: EP US)
C23C 16/4581 (2013.01 - EP US); C23C 16/4587 (2013.01 - EP US); C23C 16/50 (2013.01 - EP); H01L 21/67313 (2013.01 - EP US); C23C 16/50 (2013.01 - US)
Citation (search report)
See references of WO 2019238821A1
Designated contracting state (EPC)
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
Designated extension state (EPC)
BA ME
DOCDB simple family (publication)
DE 102018114159 A1 20191219; CN 112313360 A 20210202; EP 3807441 A1 20210421; US 11873559 B2 20240116; US 2021363636 A1 20211125; WO 2019238821 A1 20191219
DOCDB simple family (application)
DE 102018114159 A 20180613; CN 201980039821 A 20190613; EP 19731237 A 20190613; EP 2019065492 W 20190613; US 201917251442 A 20190613