EP 3810827 A1 20210428 - ARRANGEMENT FOR MEASURING THE SURFACE TEMPERATURE OF A SUSCEPTOR IN A CVD REACTOR
Title (en)
ARRANGEMENT FOR MEASURING THE SURFACE TEMPERATURE OF A SUSCEPTOR IN A CVD REACTOR
Title (de)
ANORDNUNG ZUM MESSEN DER OBERFLÄCHENTEMPERATUR EINES SUSZEPTORS IN EINEM CVD-REAKTOR
Title (fr)
ENSEMBLE POUR LA MESURE DE LA TEMPÉRATURE DE SURFACE D'UN SUSCEPTEUR DANS UN RÉACTEUR DE DÉPÔT PHYSIQUE EN PHASE VAPEUR
Publication
Application
Priority
- DE 102018114706 A 20180619
- DE 102019114249 A 20190528
- EP 2019065721 W 20190614
Abstract (en)
[origin: WO2019243196A1] The invention relates to a cover plate (4, 5) for use in a CVD reactor, wherein the cover plate has a circumferential edge extending on a circular arc line, or wherein a plurality of identically configured cover plates (4) can be arranged in a circle such that their outer edges extending along circular arcs complement each other to form a complete circle. Storage spaces for substrates (10) or substrate holders supporting substrates (10) are located within the surface of the cover plate. According to the invention, the cover plate has openings (15) which are open to their two sides pointing away from one another and through which the upper side (3) of the susceptor (2) can be seen, so that an optical temperature measurement can be carried out through the opening (15).
IPC 8 full level
C23C 16/458 (2006.01); C23C 16/46 (2006.01); C23C 16/52 (2006.01); H01L 21/66 (2006.01); H01L 21/67 (2006.01); H01L 21/687 (2006.01)
CPC (source: EP KR US)
C23C 16/4584 (2013.01 - EP US); C23C 16/4585 (2013.01 - EP); C23C 16/4586 (2013.01 - EP KR US); C23C 16/46 (2013.01 - EP KR US); C23C 16/52 (2013.01 - EP KR US); H01L 21/67103 (2013.01 - EP KR); H01L 21/67248 (2013.01 - EP KR); H01L 21/68735 (2013.01 - EP KR); H01L 21/68764 (2013.01 - EP KR); H01L 21/68771 (2013.01 - EP KR); H01L 21/68785 (2013.01 - EP KR)
Citation (search report)
See references of WO 2019243196A1
Designated contracting state (EPC)
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
Designated extension state (EPC)
BA ME
DOCDB simple family (publication)
DE 102019114249 A1 20191219; CN 112513327 A 20210316; CN 112513327 B 20230829; EP 3810827 A1 20210428; JP 2021527963 A 20211014; JP 7377824 B2 20231110; KR 20210022066 A 20210302; TW 202006184 A 20200201; TW I838379 B 20240411; US 2021262087 A1 20210826; WO 2019243196 A1 20191226
DOCDB simple family (application)
DE 102019114249 A 20190528; CN 201980048259 A 20190614; EP 19731699 A 20190614; EP 2019065721 W 20190614; JP 2020570960 A 20190614; KR 20217001480 A 20190614; TW 108121024 A 20190618; US 201917250221 A 20190614