EP 3828534 A1 20210602 - X-RAY FLUORESCENCE IMAGING FOR DETERMINING LAYER THICKNESSES
Title (en)
X-RAY FLUORESCENCE IMAGING FOR DETERMINING LAYER THICKNESSES
Title (de)
BILDGEBUNG MITTELS RÖNTGENFLUORESZENZ ZUR BESTIMMUNG VON SCHICHTDICKEN
Title (fr)
IMAGERIE PAR FLUORESCENCE X POUR DÉTERMINER DES ÉPAISSEURS DE COUCHES
Publication
Application
Priority
CZ 2019727 A 20191128
Abstract (en)
The invention discloses a method of the non-destructive examination of a layered structure, within the framework of which the examined object (5) is irradiated in the place of interest by a plane beam (4) of penetrating radiation with a sharp edge at an angle (α) of incidence in the order of units of degrees, subsequently the imaging camera (3) detects fluorescent radiation and scattered particles, based on the recorded signal of which passages (δ) with an increasing/decreasing change of values of the signal are ascertained and the thickness of the layer is subsequently determined using the formula t<sub>n</sub> = δ<sub>n</sub> • tg α.
IPC 8 full level
G01N 23/223 (2006.01)
CPC (source: CZ EP)
G01B 15/02 (2013.01 - EP); G01N 23/207 (2013.01 - CZ); G01N 23/223 (2013.01 - CZ EP)
Citation (applicant)
- CZ 2015623 A3 20161005 - ADVACAM S R O [CZ]
- CZ 201527 A3 20160727 - PIXEL R&D S R O [CZ]
- K. OSTERLOH: "X-RAY Backscatter Imaging with a Novel Twisted Slit Collimator", ECNDT 2012, 2010
Citation (search report)
- [XP] CZ 33590 U1 20191230 - USTAV TEORETICKE A APLIKOVANE MECH AV CR V V I [CZ]
- [A] WO 2016116078 A1 20160728 - PIXEL R&D S R O [CZ]
- [A] ROMANO FRANCESCO PAOLO ET AL: "Macro and Micro Full Field X-Ray Fluorescence with an X-Ray Pinhole Camera Presenting High Energy and High Spatial Resolution", ANALYTICAL CHEMISTRY, vol. 86, no. 21, 17 October 2014 (2014-10-17), pages 10892 - 10899, XP055791835, ISSN: 0003-2700, DOI: 10.1021/ac503263h
- [A] CZYZYCKI MATEUSZ ET AL: "Monte Carlo simulation code for confocal 3D micro-beam X-ray fluorescence analysis of stratified materials", X-RAY SPECTROMETRY, vol. 40, no. 2, 4 March 2011 (2011-03-04), GB, pages 88 - 95, XP055791773, ISSN: 0049-8246, DOI: 10.1002/xrs.1300
Designated contracting state (EPC)
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
Designated extension state (EPC)
BA ME
DOCDB simple family (publication)
EP 3828534 A1 20210602; EP 3828534 B1 20230104; CZ 2019727 A3 20210113; CZ 308631 B6 20210113
DOCDB simple family (application)
EP 20210190 A 20201127; CZ 2019727 A 20191128