EP 3833799 A1 20210616 - DEVICE AND METHOD FOR PRODUCING LAYERS WITH IMPROVED UNIFORMITY IN COATING SYSTEMS WITH HORIZONTALLY ROTATING SUBSTRATE GUIDING
Title (en)
DEVICE AND METHOD FOR PRODUCING LAYERS WITH IMPROVED UNIFORMITY IN COATING SYSTEMS WITH HORIZONTALLY ROTATING SUBSTRATE GUIDING
Title (de)
VORRICHTUNG UND VERFAHREN ZUR HERSTELLUNG VON SCHICHTEN MIT VERBESSERTER UNIFORMITÄT BEI BESCHICHTUNGSANLAGEN MIT HORIZONTAL ROTIERENDER SUBSTRATFÜHRUNG
Title (fr)
DISPOSITIF ET PROCÉDÉ POUR PRODUIRE DES COUCHES PRÉSENTANT UNE MEILLEURE UNIFORMITÉ DANS DES INSTALLATIONS DE REVÊTEMENT COMPRENANT UN GUIDAGE ROTATIF HORIZONTAL DU SUBSTRAT
Publication
Application
Priority
- DE 102018213534 A 20180810
- EP 2019071460 W 20190809
Abstract (en)
[origin: WO2020030794A1] The invention relates to a device and a method for producing layers with very good uniformity in coating systems with horizontally rotating substrate guiding. Alternatively, certain layer thickness gradients can be set. The particle loading is also significantly reduced. The service life is much higher compared to other methods. Parasitic coatings are reduced. The coating rate is also increased.
IPC 8 full level
C23C 14/04 (2006.01); C23C 14/34 (2006.01); C23C 14/35 (2006.01); C23C 14/50 (2006.01); C23C 14/54 (2006.01); H01J 37/34 (2006.01)
CPC (source: EP US)
C23C 14/044 (2013.01 - EP US); C23C 14/3485 (2013.01 - EP US); C23C 14/352 (2013.01 - EP US); C23C 14/505 (2013.01 - EP US); C23C 14/547 (2013.01 - EP US); H01J 37/32935 (2013.01 - EP); H01J 37/3417 (2013.01 - EP); H01J 37/3426 (2013.01 - EP); H01J 37/3452 (2013.01 - EP); H01J 37/3467 (2013.01 - EP)
Designated contracting state (EPC)
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
Designated extension state (EPC)
BA ME
DOCDB simple family (publication)
DE 102018213534 A1 20200213; CN 112585293 A 20210330; CN 112585293 B 20230623; EP 3833799 A1 20210616; JP 2021534323 A 20211209; JP 7277565 B2 20230519; US 2021164092 A1 20210603; WO 2020030794 A1 20200213
DOCDB simple family (application)
DE 102018213534 A 20180810; CN 201980052966 A 20190809; EP 19753322 A 20190809; EP 2019071460 W 20190809; JP 2021507037 A 20190809; US 201917267106 A 20190809