EP 3846198 A1 20210707 - CLEANING DEVICE
Title (en)
CLEANING DEVICE
Title (de)
REINIGUNGSVORRICHTUNG
Title (fr)
DISPOSITIF DE NETTOYAGE
Publication
Application
Priority
- JP 2018161562 A 20180830
- JP 2019033077 W 20190823
Abstract (en)
Provided is a cleaning device that can prevent reduction of an electrostatic clamping force in a vacuum state and can remove foreign matter in a vacuum processing chamber of a semiconductor manufacturing apparatus. The cleaning device includes: a foreign matter attraction unit 4 in which attraction electrodes 3 composed of a pair of electrodes are provided inside an insulator; and an attraction control unit 5 that turns on a control switch to charge the attraction electrodes and generate an electrostatic clamping force on a surface of the insulator to enable attraction of foreign matter, wherein the control switch of the attraction control unit 5 is a remotely-operable switch that is externally operable, and foreign matter in the vacuum processing chamber can be removed by an electrostatic clamping force generated in a vacuum state by turning on the control switch for the cleaning device in a vacuum closed space closed in the vacuum state.
IPC 8 full level
H01L 21/02 (2006.01); H01L 21/677 (2006.01)
CPC (source: EP KR US)
B08B 6/00 (2013.01 - EP KR); B08B 9/08 (2013.01 - US); C23C 14/564 (2013.01 - EP); C23C 16/4401 (2013.01 - EP KR); C23C 16/4583 (2013.01 - KR); C23C 16/4586 (2013.01 - EP); H01J 37/32715 (2013.01 - KR); H01J 37/32862 (2013.01 - EP KR); H01L 21/02082 (2013.01 - US); H01L 21/67017 (2013.01 - US); H01L 21/67028 (2013.01 - EP KR); H01L 21/6831 (2013.01 - EP KR); H01L 21/6833 (2013.01 - US); H01L 21/6838 (2013.01 - US)
Designated contracting state (EPC)
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
Designated extension state (EPC)
BA ME
DOCDB simple family (publication)
US 2021166956 A1 20210603; CN 112640042 A 20210409; EP 3846198 A1 20210707; EP 3846198 A4 20220601; JP 7350339 B2 20230926; JP WO2020045286 A1 20210812; KR 102671297 B1 20240603; KR 20210049111 A 20210504; SG 11202101566S A 20210330; TW 202027125 A 20200716; TW I809182 B 20230721; WO 2020045286 A1 20200305
DOCDB simple family (application)
US 201917265893 A 20190823; CN 201980055806 A 20190823; EP 19855613 A 20190823; JP 2019033077 W 20190823; JP 2020539418 A 20190823; KR 20217006428 A 20190823; SG 11202101566S A 20190823; TW 108130978 A 20190829