EP 3847466 A1 20210714 - METHOD FOR POSITIONING TEST SUBSTRATE, PROBES AND INSPECTION UNIT RELATIVE TO ONE ANOTHER, AND TESTER FOR CARRYING OUT THE METHOD
Title (en)
METHOD FOR POSITIONING TEST SUBSTRATE, PROBES AND INSPECTION UNIT RELATIVE TO ONE ANOTHER, AND TESTER FOR CARRYING OUT THE METHOD
Title (de)
VERFAHREN ZUR POSITIONIERUNG VON TESTSUBSTRAT, SONDEN UND INSPEKTIONSEINHEIT RELATIV ZUEINANDER UND PROBER ZU DESSEN AUSFÜHRUNG
Title (fr)
PROCÉDÉ DE POSITIONNEMENT D'UN SUBSTRAT D'ESSAI, DE SONDES ET D'UNE UNITÉ D'INSPECTION L'UN PAR RAPPORT À L'AUTRE, ET APPAREIL DE TEST POUR LA MISE EN ?UVRE DE CE PROCÉDÉ
Publication
Application
Priority
- DE 102018121911 A 20180907
- DE 2019100794 W 20190904
Abstract (en)
[origin: WO2020048567A1] The invention relates to a method and a tester (1) for positioning the test substrate (5), probes (6) and inspection unit (9) relative to one another, in which the test substrate (5) and the probes (6) are oriented into a desired position relative to one another at least in the X-Y plane, and the inspection unit (9) is moved in a Z position over the relative position in which the focus of the inspection unit (9) is set onto an observation point on the test substrate (5). In order to make tracking of the inspection unit (9) simpler and faster, the test substrate (5) and the inspection unit (9) are moved synchronously from this starting position in the Z direction such that the focal plane is maintained.
IPC 8 full level
G01R 31/28 (2006.01)
CPC (source: EP KR)
G01R 31/2867 (2013.01 - KR); G01R 31/2887 (2013.01 - KR); G01R 31/2891 (2013.01 - EP KR)
Citation (search report)
See references of WO 2020048567A1
Designated contracting state (EPC)
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
Designated extension state (EPC)
BA ME
DOCDB simple family (publication)
WO 2020048567 A1 20200312; CN 112585485 A 20210330; DE 102018121911 A1 20200312; EP 3847466 A1 20210714; KR 20210055708 A 20210517; TW 202027227 A 20200716
DOCDB simple family (application)
DE 2019100794 W 20190904; CN 201980055304 A 20190904; DE 102018121911 A 20180907; EP 19780142 A 20190904; KR 20217007863 A 20190904; TW 108131957 A 20190904