EP 3847691 A1 20210714 - WAFER BOAT
Title (en)
WAFER BOAT
Title (de)
WAFERBOOT
Title (fr)
PORTE-PLAQUETTES
Publication
Application
Priority
- DE 102018215183 A 20180906
- EP 2019072885 W 20190827
Abstract (en)
[origin: WO2020048833A1] The invention relates to a wafer boat for holding wafers, in particular semiconductor wafers. The wafer boat has at least two elongate holding elements. Each holding element consists of quartz and has a plurality of parallel holding slots running perpendicularly to the longitudinal extent. Furthermore, the wafer boat has elongate supporting elements, each holding element being assigned at least one supporting element. The supporting elements consist of a second material different from quartz. In a working orientation of the wafer boat, the supporting elements are at least partly below the respective holding elements in the direction of gravity. The wafer boat also has two end plates, between which the holding elements are arranged and fastened in such a way that the holding slots of the holding elements are aligned with one another. SiC and Si-SiC, for example, can be used as the second material, but any other material which, by virtue of higher strength, dimensional stability and/or temperature resistance than the material of the holding elements, is suitable for supporting the holding elements can also be used. Furthermore, the requirement that the material of the supporting elements must not contaminate the wafers can be met more easily, because the wafers are not in direct contact with the supporting elements.
IPC 8 full level
H01L 21/673 (2006.01)
CPC (source: CN EP)
H01L 21/67313 (2013.01 - EP); H01L 21/6732 (2013.01 - CN); H01L 21/67316 (2013.01 - EP)
Citation (search report)
See references of WO 2020048833A1
Designated contracting state (EPC)
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
Designated extension state (EPC)
BA ME
DOCDB simple family (publication)
WO 2020048833 A1 20200312; CN 110880466 A 20200313; DE 102019212796 A1 20200312; EP 3847691 A1 20210714
DOCDB simple family (application)
EP 2019072885 W 20190827; CN 201910839007 A 20190905; DE 102019212796 A 20190827; EP 19766194 A 20190827