EP 3871473 A1 20210901 - MONITORING LIGHT EMISSIONS
Title (en)
MONITORING LIGHT EMISSIONS
Title (de)
ÜBERWACHUNG VON LICHTEMISSIONEN
Title (fr)
SURVEILLANCE DES ÉMISSIONS DE LUMIÈRE
Publication
Application
Priority
- US 201862751267 P 20181026
- US 2019057944 W 20191024
Abstract (en)
[origin: WO2020086901A1] Provided is a system that includes a vacuum chamber with an interior region that is configured to receive a target and a light beam. The target material emits extreme ultraviolet (EUV) light when in a plasma state. The system also includes a detection system configured to image the interior region by detecting light emission from atoms, ions, or molecules in the interior region and producing a representation of a spatial distribution of the light emission in the interior region. A control system is coupled to the detection system. The control system is configured to analyze the representation of the spatial distribution to determine a spatial distribution of the light emission from atoms, ions, or molecules in the interior region, and determine whether to adjust a property of the light beam and/or a property of the vacuum chamber based on the spatial distribution of the light emission.
IPC 8 full level
H05G 2/00 (2006.01)
CPC (source: EP KR)
H05G 2/005 (2013.01 - EP KR); H05G 2/008 (2013.01 - EP KR)
Designated contracting state (EPC)
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
Designated extension state (EPC)
BA ME
DOCDB simple family (publication)
WO 2020086901 A1 20200430; CN 112930714 A 20210608; EP 3871473 A1 20210901; KR 20210078494 A 20210628; NL 2024090 A 20200513; TW 202032278 A 20200901; TW I821437 B 20231111
DOCDB simple family (application)
US 2019057944 W 20191024; CN 201980070983 A 20191024; EP 19806069 A 20191024; KR 20217011917 A 20191024; NL 2024090 A 20191024; TW 108138412 A 20191024