EP 3881362 A1 20210922 - METHOD FOR SELECTIVELY FILLING, WITH A FILLING LIQUID, A GROUP OF CAVITIES FROM AMONG A PLURALITY OF CAVITIES
Title (en)
METHOD FOR SELECTIVELY FILLING, WITH A FILLING LIQUID, A GROUP OF CAVITIES FROM AMONG A PLURALITY OF CAVITIES
Title (de)
VERFAHREN ZUM SELEKTIVEN BEFÜLLEN EINER GRUPPE VON HOHLRÄUMEN AUS MEHREREN HOHLRÄUMEN MIT EINER FÜLLFLÜSSIGKEIT
Title (fr)
PROCEDE DE REMPLISSAGE SELECTIF, PAR UN LIQUIDE DE REMPLISSAGE, D'UN GROUPE DE CAVITES PARMI UNE PLURALITE DE CAVITES
Publication
Application
Priority
- FR 1873500 A 20181220
- FR 2019052849 W 20191129
Abstract (en)
[origin: WO2020128182A1] S 66194 GR-G–EXT PCT 29 ABSTRACT The invention relates to a method for selectively filling, with a filling liquid (15), a first cavity (11) from among a plurality of cavities (10), each cavity opening out at a front face (21) of a substrate, the method comprising the following steps: a) a processing step intended to alter the surface energy of the first internal surface (12) of the first cavity (11) or the surface energy of the second internal surfaces (12 2) of the other cavities, such that the first surface (12) has a first surface energy and the second surfaces have a second surface energy; b) a step comprising a sequence for spreading the filling liquid (15); the first and the second energy being adjusted such that the first and the second surfaces exert an attracting effect and a repelling effect, respectively, on the liquid (15). 1 Figure for abstract: figure 2d.
IPC 8 full level
H01L 33/00 (2010.01); H01L 33/08 (2010.01); H01L 33/18 (2010.01); H01L 33/20 (2010.01); H01L 33/44 (2010.01); H01L 33/50 (2010.01)
CPC (source: EP KR US)
H01L 33/0025 (2013.01 - EP KR US); H01L 33/0041 (2013.01 - KR); H01L 33/06 (2013.01 - US); H01L 33/08 (2013.01 - KR US); H01L 33/18 (2013.01 - KR); H01L 33/20 (2013.01 - EP KR US); H01L 33/42 (2013.01 - US); H01L 33/44 (2013.01 - KR US); H01L 33/50 (2013.01 - US); H01L 33/501 (2013.01 - KR); H01L 33/505 (2013.01 - KR); H01L 33/0041 (2013.01 - EP); H01L 33/08 (2013.01 - EP); H01L 33/18 (2013.01 - EP); H01L 33/44 (2013.01 - EP); H01L 33/501 (2013.01 - EP); H01L 33/505 (2013.01 - EP); H01L 2933/0041 (2013.01 - KR)
Citation (search report)
See references of WO 2020128182A1
Designated contracting state (EPC)
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
Designated extension state (EPC)
BA ME
DOCDB simple family (publication)
WO 2020128182 A1 20200625; CN 113302752 A 20210824; EP 3881362 A1 20210922; FR 3091006 A1 20200626; FR 3091006 B1 20210115; KR 20210105902 A 20210827; US 2022029048 A1 20220127
DOCDB simple family (application)
FR 2019052849 W 20191129; CN 201980088429 A 20191129; EP 19835709 A 20191129; FR 1873500 A 20181220; KR 20217019037 A 20191129; US 201917415444 A 20191129